Global to push GA events into
skip to main content

Title: Fabrication process for a gradient index x-ray lens

A process for fabricating high efficiency x-ray lenses that operate in the 0.5-4.0 keV region suitable for use in biological imaging, surface science, and x-ray lithography of integrated circuits. The gradient index x-ray optics fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. The process enables the fabrication of transmissive gradient index x-ray optics for the 0.5-4.0 keV energy range. This process allows the fabrication of optical elements for the next generation of imaging and x-ray lithography instruments m the soft x-ray region.
Inventors:
 [1];  [1];  [1]
  1. (Livermore, CA)
Issue Date:
OSTI Identifier:
869707
Assignee:
United States of America as represented by Department of Energy (Washington, DC) LLNL
Patent Number(s):
US 5382342
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
fabrication; process; gradient; index; x-ray; lens; fabricating; efficiency; lenses; operate; 5-4; kev; region; suitable; biological; imaging; surface; science; lithography; integrated; circuits; optics; broadly; involves; co-sputtering; multi-layers; film; wire; followed; slicing; mounting; block; beam; thinning; thickness; determined; periodic; testing; enables; transmissive; energy; range; allows; optical; elements; generation; instruments; soft; gradient index; x-ray lens; x-ray optics; x-ray lithography; optical element; optical elements; integrated circuits; integrated circuit; soft x-ray; fabrication process; energy range; process enables; process allows; kev energy; kev region; /204/