Fabrication process for a gradient index x-ray lens

Bionta, Richard M; Makowiecki, Daniel M; Skulina, Kenneth M

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Title: Fabrication process for a gradient index x-ray lens

Abstract

A process for fabricating high efficiency x-ray lenses that operate in the 0.5-4.0 keV region suitable for use in biological imaging, surface science, and x-ray lithography of integrated circuits. The gradient index x-ray optics fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. The process enables the fabrication of transmissive gradient index x-ray optics for the 0.5-4.0 keV energy range. This process allows the fabrication of optical elements for the next generation of imaging and x-ray lithography instruments m the soft x-ray region.

Inventors:

Bionta, Richard M ^[1]; Makowiecki, Daniel M ^[1]; Skulina, Kenneth M ^[1]

Livermore, CA

Issue Date:: 1995-01-01

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

OSTI Identifier:: 869707

Patent Number(s):: 5382342

Assignee:: United States of America as represented by Department of Energy (Washington, DC)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/16 - on metallic substrates or on substrates of boron or silicon
C23C14/562 - {for coating elongated substrates}

G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G21K1/10 - Scattering devices

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: fabrication; process; gradient; index; x-ray; lens; fabricating; efficiency; lenses; operate; 5-4; kev; region; suitable; biological; imaging; surface; science; lithography; integrated; circuits; optics; broadly; involves; co-sputtering; multi-layers; film; wire; followed; slicing; mounting; block; beam; thinning; thickness; determined; periodic; testing; enables; transmissive; energy; range; allows; optical; elements; generation; instruments; soft; gradient index; x-ray lens; x-ray optics; x-ray lithography; optical element; optical elements; integrated circuits; integrated circuit; soft x-ray; fabrication process; energy range; process enables; process allows; kev energy; kev region; /204/

Citation Formats


                    Bionta, Richard M, Makowiecki, Daniel M, and Skulina, Kenneth M. Fabrication process for a gradient index x-ray lens.  United States: N. p., 1995. 
        Web.

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                    Bionta, Richard M, Makowiecki, Daniel M, & Skulina, Kenneth M. Fabrication process for a gradient index x-ray lens.  United States.

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                    Bionta, Richard M, Makowiecki, Daniel M, and Skulina, Kenneth M. Sun .  
        "Fabrication process for a gradient index x-ray lens".  United States.  https://www.osti.gov/servlets/purl/869707.

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@article{osti_869707,

  title        = {Fabrication process for a gradient index x-ray lens},

  author       = {Bionta, Richard M and Makowiecki, Daniel M and Skulina, Kenneth M},

  abstractNote = {A process for fabricating high efficiency x-ray lenses that operate in the 0.5-4.0 keV region suitable for use in biological imaging, surface science, and x-ray lithography of integrated circuits. The gradient index x-ray optics fabrication process broadly involves co-sputtering multi-layers of film on a wire, followed by slicing and mounting on block, and then ion beam thinning to a thickness determined by periodic testing for efficiency. The process enables the fabrication of transmissive gradient index x-ray optics for the 0.5-4.0 keV energy range. This process allows the fabrication of optical elements for the next generation of imaging and x-ray lithography instruments m the soft x-ray region.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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Works referenced in this record:

8 Kev X-Ray Zone Plates
conference, July 1989

Bionta, R. M.; Ables, E.; Clamp, O.
33rd Annual Techincal Symposium, SPIE Proceedings
https://doi.org/10.1117/12.962622

Transmission gratings that diffract 8 keV x rays
journal, September 1987

Bionta, R. M.
Applied Physics Letters, Vol. 51, Issue 10
https://doi.org/10.1063/1.98901

Sputtered-Sliced Linear Zone Plates for 8 keV X-Rays
book, January 1988

Bionta, R. M.; Jankowski, A. F.; Makowiecki, D. M.
Springer Series in Optical Sciences
https://doi.org/10.1007/978-3-540-39246-0_24

Tabletop x-ray microscope using 8 keV zone plates
journal, January 1990

Bionta, Richard M.
Optical Engineering, Vol. 29, Issue 6
https://doi.org/10.1117/12.55632

Sputtered-Sliced Multilayers: Zone Plates And Transmission Gratings For 8-kev X Rays
conference, December 1988

Bionta, R. M.; Ables, E.; Cook, K. J.
32nd Annual Technical Symposium, SPIE Proceedings
https://doi.org/10.1117/12.948793

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Similar Records

Title: Fabrication process for a gradient index x-ray lens

Abstract

Citation Formats

8 Kev X-Ray Zone Plates conference, July 1989

Transmission gratings that diffract 8 keV x rays journal, September 1987

Sputtered-Sliced Linear Zone Plates for 8 keV X-Rays book, January 1988

Tabletop x-ray microscope using 8 keV zone plates journal, January 1990

Sputtered-Sliced Multilayers: Zone Plates And Transmission Gratings For 8-kev X Rays conference, December 1988

8 Kev X-Ray Zone Plates
conference, July 1989

Transmission gratings that diffract 8 keV x rays
journal, September 1987

Sputtered-Sliced Linear Zone Plates for 8 keV X-Rays
book, January 1988

Tabletop x-ray microscope using 8 keV zone plates
journal, January 1990

Sputtered-Sliced Multilayers: Zone Plates And Transmission Gratings For 8-kev X Rays
conference, December 1988