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Title: Condenser for illuminating a ring field

Abstract

A series of segments of a parent aspheric mirror having one foci at at a si-point source of radiation and the other foci at the radius of a ring field have all but one or all of their beams translated and rotated by sets of mirrors such that all of the beams pass through the real entrance pupil of a ring field camera about one of the beams and fall onto the ring field radius as a coincident image as an arc of the ring field.

Inventors:
 [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
869595
Patent Number(s):
5361292
Assignee:
United States of America as represented by Department of Energy (Washington, DC)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
condenser; illuminating; field; series; segments; parent; aspheric; mirror; foci; si-point; source; radiation; radius; beams; translated; rotated; sets; mirrors; pass; entrance; pupil; camera; fall; coincident; image; entrance pupil; beams pass; parent aspheric; aspheric mirror; si-point source; beams translated; /378/359/

Citation Formats

Sweatt, William C. Condenser for illuminating a ring field. United States: N. p., 1994. Web.
Sweatt, William C. Condenser for illuminating a ring field. United States.
Sweatt, William C. Sat . "Condenser for illuminating a ring field". United States. https://www.osti.gov/servlets/purl/869595.
@article{osti_869595,
title = {Condenser for illuminating a ring field},
author = {Sweatt, William C},
abstractNote = {A series of segments of a parent aspheric mirror having one foci at at a si-point source of radiation and the other foci at the radius of a ring field have all but one or all of their beams translated and rotated by sets of mirrors such that all of the beams pass through the real entrance pupil of a ring field camera about one of the beams and fall onto the ring field radius as a coincident image as an arc of the ring field.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent: