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Title: .beta.-silicon carbide protective coating and method for fabricating same

Abstract

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.

Inventors:
 [1];  [2]
  1. (Mountain View, CA)
  2. (Brentwood, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869587
Patent Number(s):
5360491
Assignee:
United States of America as represented by United States (Washington, DC) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
beta; -silicon; carbide; protective; coating; method; fabricating; polycrystalline; beta-silicon; film; forming; components; top; solar; cells; extremely; hard; surface; anti-reflective; achieved; dc; magnetron; co-sputtering; amorphous; silicon; carbon; form; sic; cell; irradiated; pulsed; energy; source; excimer; laser; synthesize; poly-; c-sic; produce; -sic; primary; application; manufacturing; wherever; requirement; reflective coating; pulsed energy; protective surface; protective coating; amorphous silicon; solar cell; silicon carbide; solar cells; energy source; excimer laser; dc magnet; dc magnetron; hard surface; -silicon carbide; anti-reflective coating; /136/204/257/427/438/

Citation Formats

Carey, Paul G., and Thompson, Jesse B. .beta.-silicon carbide protective coating and method for fabricating same. United States: N. p., 1994. Web.
Carey, Paul G., & Thompson, Jesse B. .beta.-silicon carbide protective coating and method for fabricating same. United States.
Carey, Paul G., and Thompson, Jesse B. Sat . ".beta.-silicon carbide protective coating and method for fabricating same". United States. https://www.osti.gov/servlets/purl/869587.
@article{osti_869587,
title = {.beta.-silicon carbide protective coating and method for fabricating same},
author = {Carey, Paul G. and Thompson, Jesse B.},
abstractNote = {A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

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