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Title: .beta.-silicon carbide protective coating and method for fabricating same

Abstract

A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.

Inventors:
 [1];  [2]
  1. Mountain View, CA
  2. Brentwood, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869587
Patent Number(s):
5360491
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
beta; -silicon; carbide; protective; coating; method; fabricating; polycrystalline; beta-silicon; film; forming; components; top; solar; cells; extremely; hard; surface; anti-reflective; achieved; dc; magnetron; co-sputtering; amorphous; silicon; carbon; form; sic; cell; irradiated; pulsed; energy; source; excimer; laser; synthesize; poly-; c-sic; produce; -sic; primary; application; manufacturing; wherever; requirement; reflective coating; pulsed energy; protective surface; protective coating; amorphous silicon; solar cell; silicon carbide; solar cells; energy source; excimer laser; dc magnet; dc magnetron; hard surface; -silicon carbide; anti-reflective coating; /136/204/257/427/438/

Citation Formats

Carey, Paul G, and Thompson, Jesse B. .beta.-silicon carbide protective coating and method for fabricating same. United States: N. p., 1994. Web.
Carey, Paul G, & Thompson, Jesse B. .beta.-silicon carbide protective coating and method for fabricating same. United States.
Carey, Paul G, and Thompson, Jesse B. Sat . ".beta.-silicon carbide protective coating and method for fabricating same". United States. https://www.osti.gov/servlets/purl/869587.
@article{osti_869587,
title = {.beta.-silicon carbide protective coating and method for fabricating same},
author = {Carey, Paul G and Thompson, Jesse B},
abstractNote = {A polycrystalline beta-silicon carbide film or coating and method for forming same on components, such as the top of solar cells, to act as an extremely hard protective surface, and as an anti-reflective coating. This is achieved by DC magnetron co-sputtering of amorphous silicon and carbon to form a SiC thin film onto a surface, such as a solar cell. The thin film is then irradiated by a pulsed energy source, such as an excimer laser, to synthesize the poly- or .mu.c-SiC film on the surface and produce .beta.--SiC. While the method of this invention has primary application in solar cell manufacturing, it has application wherever there is a requirement for an extremely hard surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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Works referenced in this record:

beta -SiC/Si heterojunction bipolar transistors with high current gain
journal, February 1988