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Title: System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer

Abstract

A system and method for generating a desired displacement of an object, i.e., a target, from a reference position with ultra-high accuracy utilizes a Fabry-Perot etalon having an expandable tube cavity for resolving, with an Iodine stabilized laser, displacements with high accuracy and for effecting (as an actuator) displacements of the target. A mechanical amplifier in the form of a micropositioning stage has a platform and a frame which are movable relative to one another, and the tube cavity of the etalon is connected between the platform and frame so that an adjustment in length of the cavity effects a corresponding, amplified movement of the frame relative to the cavity. Therefore, in order to provide a preselected magnitude of displacement of the stage frame relative to the platform, the etalon tube cavity is adjusted in length by a corresponding amount. The system and method are particularly well-suited for use when calibrating a high accuracy measuring device.

Inventors:
 [1]
  1. (Knoxville, TN)
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
OSTI Identifier:
869529
Patent Number(s):
5353115
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN) ORNL
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; generating; displacement; ultra-high; accuracy; fabry-perot; interferometer; desired; target; reference; position; utilizes; etalon; expandable; tube; cavity; resolving; iodine; stabilized; laser; displacements; effecting; actuator; mechanical; amplifier; form; micropositioning; stage; platform; frame; movable; relative; connected; adjustment; length; effects; corresponding; amplified; movement; provide; preselected; magnitude; adjusted; amount; particularly; well-suited; calibrating; measuring; device; fabry-perot interferometer; measuring device; movable relative; reference position; preselected magnitude; ultra-high accuracy; corresponding amount; /356/250/

Citation Formats

McIntyre, Timothy J. System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer. United States: N. p., 1994. Web.
McIntyre, Timothy J. System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer. United States.
McIntyre, Timothy J. Sat . "System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer". United States. https://www.osti.gov/servlets/purl/869529.
@article{osti_869529,
title = {System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer},
author = {McIntyre, Timothy J.},
abstractNote = {A system and method for generating a desired displacement of an object, i.e., a target, from a reference position with ultra-high accuracy utilizes a Fabry-Perot etalon having an expandable tube cavity for resolving, with an Iodine stabilized laser, displacements with high accuracy and for effecting (as an actuator) displacements of the target. A mechanical amplifier in the form of a micropositioning stage has a platform and a frame which are movable relative to one another, and the tube cavity of the etalon is connected between the platform and frame so that an adjustment in length of the cavity effects a corresponding, amplified movement of the frame relative to the cavity. Therefore, in order to provide a preselected magnitude of displacement of the stage frame relative to the platform, the etalon tube cavity is adjusted in length by a corresponding amount. The system and method are particularly well-suited for use when calibrating a high accuracy measuring device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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