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Title: Solar-induced chemical vapor deposition of diamond-type carbon films

Abstract

An improved chemical vapor deposition method for depositing transparent continuous coatings of sp.sup.3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H.sub.2 reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm.sup.2 through said reactant mixture to produce substrate temperatures of about 750.degree. C. to about 950.degree. C. to activate deposition of the film on said substrate.

Inventors:
 [1];  [2];  [1];  [3]
  1. (Lakewood, CO)
  2. (Golden, CO)
  3. (Beaverton, OR)
Issue Date:
Research Org.:
MIDWEST RESEARCH INSTITUTE
OSTI Identifier:
869491
Patent Number(s):
5346729
Assignee:
Midwest Research Institute (Kansas City, MO) NREL
DOE Contract Number:  
AC02-83CH10093
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
solar-induced; chemical; vapor; deposition; diamond-type; carbon; films; improved; method; depositing; transparent; continuous; coatings; sp; -bonded; comprising; providing; volatile; hydrocarbon; gas; reactant; mixture; cold; wall; vacuum; chamber; containing; suitable; substrate; pressure; 50; torr; directing; concentrated; solar; flux; 40; 60; watts; cm; produce; temperatures; 750; degree; 950; activate; film; solar flux; reactant mixture; deposition method; hydrocarbon gas; deposition chamber; chemical vapor; vapor deposition; chamber containing; carbon film; suitable substrate; substrate temperature; carbon films; substrate temperatures; concentrated solar; rate temperature; wall vacuum; improved chemical; type carbon; volatile hydrocarbon; diamond-type carbon; continuous coating; /427/423/

Citation Formats

Pitts, J. Roland, Tracy, C. Edwin, King, David E., and Stanley, James T. Solar-induced chemical vapor deposition of diamond-type carbon films. United States: N. p., 1994. Web.
Pitts, J. Roland, Tracy, C. Edwin, King, David E., & Stanley, James T. Solar-induced chemical vapor deposition of diamond-type carbon films. United States.
Pitts, J. Roland, Tracy, C. Edwin, King, David E., and Stanley, James T. Sat . "Solar-induced chemical vapor deposition of diamond-type carbon films". United States. https://www.osti.gov/servlets/purl/869491.
@article{osti_869491,
title = {Solar-induced chemical vapor deposition of diamond-type carbon films},
author = {Pitts, J. Roland and Tracy, C. Edwin and King, David E. and Stanley, James T.},
abstractNote = {An improved chemical vapor deposition method for depositing transparent continuous coatings of sp.sup.3 -bonded diamond-type carbon films, comprising: a) providing a volatile hydrocarbon gas/H.sub.2 reactant mixture in a cold wall vacuum/chemical vapor deposition chamber containing a suitable substrate for said films, at pressure of about 1 to 50 Torr; and b) directing a concentrated solar flux of from about 40 to about 60 watts/cm.sup.2 through said reactant mixture to produce substrate temperatures of about 750.degree. C. to about 950.degree. C. to activate deposition of the film on said substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

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