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Title: Low pass filter for plasma discharge

Abstract

An isolator is disposed between a plasma reactor and its electrical energy source in order to isolate the reactor from the electrical energy source. The isolator operates as a filter to attenuate the transmission of harmonics of a fundamental frequency of the electrical energy source generated by the reactor from interacting with the energy source. By preventing harmonic interaction with the energy source, plasma conditions can be readily reproduced independent of the electrical characteristics of the electrical energy source and/or its associated coupling network.

Inventors:
 [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
869236
Patent Number(s):
5302882
Assignee:
Sematech, Inc. (Austin, TX)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
DOE Contract Number:  
FI04-89AL58872
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
pass; filter; plasma; discharge; isolator; disposed; reactor; electrical; energy; source; isolate; operates; attenuate; transmission; harmonics; fundamental; frequency; generated; interacting; preventing; harmonic; interaction; conditions; readily; reproduced; independent; characteristics; associated; coupling; network; fundamental frequency; plasma discharge; electrical energy; energy source; electrical characteristics; plasma reactor; pass filter; plasma conditions; electrical characteristic; source generate; /315/313/333/

Citation Formats

Miller, Paul A. Low pass filter for plasma discharge. United States: N. p., 1994. Web.
Miller, Paul A. Low pass filter for plasma discharge. United States.
Miller, Paul A. Sat . "Low pass filter for plasma discharge". United States. https://www.osti.gov/servlets/purl/869236.
@article{osti_869236,
title = {Low pass filter for plasma discharge},
author = {Miller, Paul A},
abstractNote = {An isolator is disposed between a plasma reactor and its electrical energy source in order to isolate the reactor from the electrical energy source. The isolator operates as a filter to attenuate the transmission of harmonics of a fundamental frequency of the electrical energy source generated by the reactor from interacting with the energy source. By preventing harmonic interaction with the energy source, plasma conditions can be readily reproduced independent of the electrical characteristics of the electrical energy source and/or its associated coupling network.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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Works referenced in this record:

Electrical isolation of radio‐frequency plasma discharges
journal, February 1992


MOVPE growth of II–VI compounds in a vertical reactor with high-speed horizontal rotating disk
journal, January 1991