CVD method for forming B.sub.i -containing oxide superconducting films
Abstract
Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.
- Inventors:
- Issue Date:
- Research Org.:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 869203
- Patent Number(s):
- 5296460
- Application Number:
- 07/926,156
- Assignee:
- Northwestern University (Evanston, IL)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C07 - ORGANIC CHEMISTRY C07C - ACYCLIC OR CARBOCYCLIC COMPOUNDS
C - CHEMISTRY C07 - ORGANIC CHEMISTRY C07F - ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- DOE Contract Number:
- FG02-86ER13511
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 1992 Aug 05
- Country of Publication:
- United States
- Language:
- English
- Subject:
- cvd; method; forming; -containing; oxide; superconducting; films; bi-sr-ca-cu-o; superconductor; prepared; mocvd; volatile; metal; organic; precursors; water; vapor; volatized; bismuth; source; deposited; heated; substrate; form; film; annealed; metal organic; -sr-ca-cu-o superconductor; superconducting film; oxide superconducting; water vapor; heated substrate; superconducting films; conducting films; organic precursors; organic precursor; conducting film; volatile metal; bi-sr-ca-cu-o superconductor; cvd method; /505/427/
Citation Formats
Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., and Zhang, Jiming. CVD method for forming B.sub.i -containing oxide superconducting films. United States: N. p., 1994.
Web.
Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., & Zhang, Jiming. CVD method for forming B.sub.i -containing oxide superconducting films. United States.
Wessels, Bruce W., Marks, Tobin J., Richeson, Darrin S., Tonge, Lauren M., and Zhang, Jiming. Sat .
"CVD method for forming B.sub.i -containing oxide superconducting films". United States. https://www.osti.gov/servlets/purl/869203.
@article{osti_869203,
title = {CVD method for forming B.sub.i -containing oxide superconducting films},
author = {Wessels, Bruce W. and Marks, Tobin J. and Richeson, Darrin S. and Tonge, Lauren M. and Zhang, Jiming},
abstractNote = {Films of high T.sub.c Bi-Sr-Ca-Cu-O superconductor have been prepared by MOCVD using volatile metal organic precursors and water vapor. The metal organic precursors are volatized along with a bismuth source, such as Bi(C.sub.6 H.sub.5).sub.3, deposited on a heated substrate to form a film, and annealed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}
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