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Title: Microelectronic superconducting crossover and coil

Abstract

A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions.

Inventors:
 [1];  [2];  [1]
  1. Berkeley, CA
  2. Oakland, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
869173
Patent Number(s):
5291035
Assignee:
Regents of University of California (Oakland, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microelectronic; superconducting; crossover; coil; component; comprising; provided; substrate; superconductor; film; insulating; srtio; third; strips; situ; method; depositing; films; require; annealing; steps; atmosphere; depositions; component comprising; superconducting film; provided comprising; annealing steps; film comprising; annealing step; superconductor film; situ method; comprising srtio; microelectronic superconducting; microelectronic component; conducting film; /505/257/

Citation Formats

Wellstood, Frederick C, Kingston, John J, and Clarke, John. Microelectronic superconducting crossover and coil. United States: N. p., 1994. Web.
Wellstood, Frederick C, Kingston, John J, & Clarke, John. Microelectronic superconducting crossover and coil. United States.
Wellstood, Frederick C, Kingston, John J, and Clarke, John. Sat . "Microelectronic superconducting crossover and coil". United States. https://www.osti.gov/servlets/purl/869173.
@article{osti_869173,
title = {Microelectronic superconducting crossover and coil},
author = {Wellstood, Frederick C and Kingston, John J and Clarke, John},
abstractNote = {A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Works referenced in this record:

Nb multilayer planarization technology for a subnanosecond Josephson 1K-bit RAM
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In Situ Fabrication of Reproducible YBCO/Au Planar Tunnel Junctions with an Artificial MgO Barrier
journal, March 1990


Tunneling Characteristics of YBaCuO/MgO/Pb Planar Tunnel Junctions and Observation of Josephson Effect
journal, April 1990


Experimental study of the RSFQ logic elements
journal, March 1989


Laser patterning of metal oxide superconductor films by reactive solid-state transformation
journal, February 1988


Deposition of superconducting Y‐Ba‐Cu‐O films at 400 °C without post‐annealing
journal, July 1988


Planar coupling scheme for ultra low noise DC SQUIDs
journal, January 1981


Process test chip for Josephson integrated circuits
journal, January 1981