Microelectronic superconducting crossover and coil
Abstract
A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions.
- Inventors:
-
- Berkeley, CA
- Oakland, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 869173
- Patent Number(s):
- 5291035
- Assignee:
- Regents of University of California (Oakland, CA)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- microelectronic; superconducting; crossover; coil; component; comprising; provided; substrate; superconductor; film; insulating; srtio; third; strips; situ; method; depositing; films; require; annealing; steps; atmosphere; depositions; component comprising; superconducting film; provided comprising; annealing steps; film comprising; annealing step; superconductor film; situ method; comprising srtio; microelectronic superconducting; microelectronic component; conducting film; /505/257/
Citation Formats
Wellstood, Frederick C, Kingston, John J, and Clarke, John. Microelectronic superconducting crossover and coil. United States: N. p., 1994.
Web.
Wellstood, Frederick C, Kingston, John J, & Clarke, John. Microelectronic superconducting crossover and coil. United States.
Wellstood, Frederick C, Kingston, John J, and Clarke, John. Sat .
"Microelectronic superconducting crossover and coil". United States. https://www.osti.gov/servlets/purl/869173.
@article{osti_869173,
title = {Microelectronic superconducting crossover and coil},
author = {Wellstood, Frederick C and Kingston, John J and Clarke, John},
abstractNote = {A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}
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