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Title: Magnetically attached sputter targets

An improved method and assembly for attaching sputtering targets to cathode assemblies of sputtering systems which includes a magnetically permeable material. The magnetically permeable material is imbedded in a target base that is brazed, welded, or soldered to the sputter target, or is mechanically retained in the target material. Target attachment to the cathode is achieved by virtue of the permanent magnets and/or the pole pieces in the cathode assembly that create magnetic flux lines adjacent to the backing plate, which strongly attract the magnetically permeable material in the target assembly.
Inventors:
 [1];  [1]
  1. (Livermore, CA)
Issue Date:
OSTI Identifier:
869159
Assignee:
Regents of University of California (Oakland, CA) LLNL
Patent Number(s):
US 5286361
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
magnetically; attached; sputter; targets; improved; method; assembly; attaching; sputtering; cathode; assemblies; systems; permeable; material; imbedded; target; base; brazed; welded; soldered; mechanically; retained; attachment; achieved; virtue; permanent; magnets; pole; pieces; create; magnetic; flux; lines; adjacent; plate; strongly; attract; permeable material; magnetically permeable; sputtering targets; pole pieces; improved method; magnetic flux; permanent magnet; permanent magnets; target material; sputter target; cathode assembly; target assembly; sputter targets; cathode assemblies; flux line; target mater; pole piece; attached sputter; magnetically attached; /204/