Method of making segmented pyrolytic graphite sputtering targets
Abstract
Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.
- Inventors:
-
- Livermore, CA
- Tracy, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 869148
- Patent Number(s):
- 5284539
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; segmented; pyrolytic; graphite; sputtering; targets; anisotropic; wafers; oriented; bonded; thermal; conductivity; planes; maximized; surface; target; allow; optimum; heat; conduction; sputter; maximum; energy; transmission; pyrolytic graphite; heat conduction; maximum energy; sputtering targets; thermal conductivity; sputter target; energy transmission; graphite sputtering; anisotropic pyrolytic; conductivity planes; /156/204/
Citation Formats
McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, and Chen, Chih-Wen. Method of making segmented pyrolytic graphite sputtering targets. United States: N. p., 1994.
Web.
McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, & Chen, Chih-Wen. Method of making segmented pyrolytic graphite sputtering targets. United States.
McKernan, Mark A, Alford, Craig S, Makowiecki, Daniel M, and Chen, Chih-Wen. Sat .
"Method of making segmented pyrolytic graphite sputtering targets". United States. https://www.osti.gov/servlets/purl/869148.
@article{osti_869148,
title = {Method of making segmented pyrolytic graphite sputtering targets},
author = {McKernan, Mark A and Alford, Craig S and Makowiecki, Daniel M and Chen, Chih-Wen},
abstractNote = {Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sat Jan 01 00:00:00 EST 1994},
month = {Sat Jan 01 00:00:00 EST 1994}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.