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Title: Ion source based on the cathodic arc

Abstract

A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.

Inventors:
 [1];  [1]
  1. Livermore, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869141
Patent Number(s):
5282944
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
source; based; cathodic; cylindrically; symmetric; produce; leave; surface; target; radially; reflected; electrostatic; fields; coated; array; electrically; isolated; rings; positioned; serves; dual; purpose; minimizing; bouncing; macroparticles; providing; electrical; insulation; maximize; electric; field; gradients; series; baffles; function; filtering; trapping; mechanism; field gradient; field gradients; electrically isolated; electric field; electrical insulation; electrostatic field; providing electrical; electrically isolate; rings positioned; electrostatic fields; cylindrically symmetric; static fields; /204/250/313/427/

Citation Formats

Sanders, David M, and Falabella, Steven. Ion source based on the cathodic arc. United States: N. p., 1994. Web.
Sanders, David M, & Falabella, Steven. Ion source based on the cathodic arc. United States.
Sanders, David M, and Falabella, Steven. Sat . "Ion source based on the cathodic arc". United States. https://www.osti.gov/servlets/purl/869141.
@article{osti_869141,
title = {Ion source based on the cathodic arc},
author = {Sanders, David M and Falabella, Steven},
abstractNote = {A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

Patent:

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