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Title: Ion source based on the cathodic arc

A cylindrically symmetric arc source to produce a ring of ions which leave the surface of the arc target radially and are reflected by electrostatic fields present in the source to a point of use, such as a part to be coated. An array of electrically isolated rings positioned in the source serves the dual purpose of minimizing bouncing of macroparticles and providing electrical insulation to maximize the electric field gradients within the source. The source also includes a series of baffles which function as a filtering or trapping mechanism for any macroparticles.
Inventors:
 [1];  [1]
  1. (Livermore, CA)
Issue Date:
OSTI Identifier:
869141
Assignee:
United States of America as represented by United States (Washington, DC) LLNL
Patent Number(s):
US 5282944
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
source; based; cathodic; cylindrically; symmetric; produce; leave; surface; target; radially; reflected; electrostatic; fields; coated; array; electrically; isolated; rings; positioned; serves; dual; purpose; minimizing; bouncing; macroparticles; providing; electrical; insulation; maximize; electric; field; gradients; series; baffles; function; filtering; trapping; mechanism; field gradient; field gradients; electrically isolated; electric field; electrical insulation; electrostatic field; providing electrical; electrically isolate; rings positioned; electrostatic fields; cylindrically symmetric; static fields; /204/250/313/427/