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Title: ECR ion source with electron gun

Abstract

An Advanced Electron Cyclotron Resonance ion source (10) having an electron gun (52) for introducing electrons into the plasma chamber (18) of the ion source (10). The ion source (10) has a injection enclosure (12) and a plasma chamber tank (14). The plasma chamber (18) is defined by a plurality of longitudinal magnets (16). The electron gun (52) injects electrons axially into the plasma chamber (18) such that ionization within the plasma chamber (18) occurs in the presence of the additional electrons produced by the electron gun (52). The electron gun (52) has a cathode (116) for emitting electrons therefrom which is heated by current supplied from an AC power supply (96) while bias potential is provided by a bias power supply (118). A concentric inner conductor (60) and Outer conductor (62) carry heating current to a carbon chuck (104) and carbon pusher (114) Which hold the cathode (116) in place and also heat the cathode (16). In the Advanced Electron Cyclotron Resonance ion source (10), the electron gun (52) replaces the conventional first stage used in prior art electron cyclotron resonance ion generators.

Inventors:
 [1];  [2]
  1. (El Cerrito, CA)
  2. (Berkeley, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
868989
Patent Number(s):
5256938
Assignee:
United States of America as represented by Department of Energy (Washington, DC) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
ecr; source; electron; gun; advanced; cyclotron; resonance; 10; 52; introducing; electrons; plasma; chamber; 18; injection; enclosure; 12; tank; 14; defined; plurality; longitudinal; magnets; 16; injects; axially; ionization; occurs; presence; additional; produced; cathode; 116; emitting; therefrom; heated; current; supplied; power; supply; 96; bias; potential; provided; 118; concentric; inner; conductor; 60; outer; 62; carry; heating; carbon; chuck; 104; pusher; 114; hold; heat; replaces; conventional; stage; prior; generators; bias potential; electron cyclotron; outer conductor; power supply; inner conductor; electron gun; cyclotron resonance; plasma chamber; additional electrons; heating current; current supplied; carry heat; concentric inner; /315/313/

Citation Formats

Xie, Zu Q., and Lyneis, Claude M. ECR ion source with electron gun. United States: N. p., 1993. Web.
Xie, Zu Q., & Lyneis, Claude M. ECR ion source with electron gun. United States.
Xie, Zu Q., and Lyneis, Claude M. Fri . "ECR ion source with electron gun". United States. https://www.osti.gov/servlets/purl/868989.
@article{osti_868989,
title = {ECR ion source with electron gun},
author = {Xie, Zu Q. and Lyneis, Claude M.},
abstractNote = {An Advanced Electron Cyclotron Resonance ion source (10) having an electron gun (52) for introducing electrons into the plasma chamber (18) of the ion source (10). The ion source (10) has a injection enclosure (12) and a plasma chamber tank (14). The plasma chamber (18) is defined by a plurality of longitudinal magnets (16). The electron gun (52) injects electrons axially into the plasma chamber (18) such that ionization within the plasma chamber (18) occurs in the presence of the additional electrons produced by the electron gun (52). The electron gun (52) has a cathode (116) for emitting electrons therefrom which is heated by current supplied from an AC power supply (96) while bias potential is provided by a bias power supply (118). A concentric inner conductor (60) and Outer conductor (62) carry heating current to a carbon chuck (104) and carbon pusher (114) Which hold the cathode (116) in place and also heat the cathode (16). In the Advanced Electron Cyclotron Resonance ion source (10), the electron gun (52) replaces the conventional first stage used in prior art electron cyclotron resonance ion generators.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

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