Microelectronic superconducting device with multi-layer contact
Abstract
A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An insitu method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high T.sub.c superconductor thin films.
- Inventors:
-
- Berkeley, CA
- Oakland, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 868984
- Patent Number(s):
- 5256636
- Assignee:
- Regents of University of Calif. (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- microelectronic; superconducting; device; multi-layer; contact; component; comprising; crossover; provided; substrate; superconductor; film; insulating; srtio; third; strips; insitu; method; depositing; films; require; annealing; steps; photolithographic; process; separately; pattern; component comprising; superconducting film; provided comprising; annealing steps; film comprising; annealing step; superconducting device; superconductor film; situ method; comprising srtio; microelectronic superconducting; microelectronic component; conducting film; /505/257/427/
Citation Formats
Wellstood, Frederick C, Kingston, John J, and Clarke, John. Microelectronic superconducting device with multi-layer contact. United States: N. p., 1993.
Web.
Wellstood, Frederick C, Kingston, John J, & Clarke, John. Microelectronic superconducting device with multi-layer contact. United States.
Wellstood, Frederick C, Kingston, John J, and Clarke, John. Fri .
"Microelectronic superconducting device with multi-layer contact". United States. https://www.osti.gov/servlets/purl/868984.
@article{osti_868984,
title = {Microelectronic superconducting device with multi-layer contact},
author = {Wellstood, Frederick C and Kingston, John J and Clarke, John},
abstractNote = {A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An insitu method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high T.sub.c superconductor thin films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}
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