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Title: Microelectronic superconducting device with multi-layer contact

Abstract

A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An insitu method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high T.sub.c superconductor thin films.

Inventors:
 [1];  [2];  [1]
  1. (Berkeley, CA)
  2. (Oakland, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
868984
Patent Number(s):
5256636
Assignee:
Regents of University of Calif. (Oakland, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microelectronic; superconducting; device; multi-layer; contact; component; comprising; crossover; provided; substrate; superconductor; film; insulating; srtio; third; strips; insitu; method; depositing; films; require; annealing; steps; photolithographic; process; separately; pattern; component comprising; superconducting film; provided comprising; annealing steps; film comprising; annealing step; superconducting device; superconductor film; situ method; comprising srtio; microelectronic superconducting; microelectronic component; conducting film; /505/257/427/

Citation Formats

Wellstood, Frederick C., Kingston, John J., and Clarke, John. Microelectronic superconducting device with multi-layer contact. United States: N. p., 1993. Web.
Wellstood, Frederick C., Kingston, John J., & Clarke, John. Microelectronic superconducting device with multi-layer contact. United States.
Wellstood, Frederick C., Kingston, John J., and Clarke, John. Fri . "Microelectronic superconducting device with multi-layer contact". United States. https://www.osti.gov/servlets/purl/868984.
@article{osti_868984,
title = {Microelectronic superconducting device with multi-layer contact},
author = {Wellstood, Frederick C. and Kingston, John J. and Clarke, John},
abstractNote = {A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An insitu method for depositing all three films on a substrate is provided which does not require annealing steps. The photolithographic process is used to separately pattern the high T.sub.c superconductor thin films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

Patent:

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