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Title: Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials

Abstract

Superconducting microcircuits including a thin layer of Ba.sub.2 Cu.sub.3 O.sub.5+x (0

Inventors:
 [1]
  1. (Los Alamos, NM)
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
868896
Patent Number(s):
5238913
Assignee:
United States of America as represented by United States (Washington, DC) LANL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
superconducting; microcircuitry; microlithgraphic; patterning; compounds; related; materials; microcircuits; including; layer; cu; substrate; dopant; example; patterns; yba; 7-x; insulator; prba; layers; covered; photoresist; exposed; light; mask; pattern; desired; circuit; developed; reveal; etched; microcircuit; stripped; remove; unneeded; portion; finally; heated; temperature; period; time; sufficient; diffuse; react; forming; superconductor; related materials; time sufficient; circuits including; superconducting compounds; desired circuit; /505/204/216/

Citation Formats

Coppa, Nicholas V. Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials. United States: N. p., 1993. Web.
Coppa, Nicholas V. Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials. United States.
Coppa, Nicholas V. Fri . "Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials". United States. https://www.osti.gov/servlets/purl/868896.
@article{osti_868896,
title = {Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials},
author = {Coppa, Nicholas V.},
abstractNote = {Superconducting microcircuits including a thin layer of Ba.sub.2 Cu.sub.3 O.sub.5+x (0},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

Patent:

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