Coherence delay augmented laser beam homogenizer
Abstract
The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.
- Inventors:
-
- Livermore, CA
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 868836
- Patent Number(s):
- 5224200
- Assignee:
- United States of America as represented by Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- coherence; delay; augmented; laser; beam; homogenizer; geometrical; restrictions; relaxed; line; separate; coherent; input; components; path; length; difference; equal; multiple; respect; recombine; incoherently; output; resultant; uniform; spatial; intensity; suitable; microlithography; pantogography; disclosed; variable; aperture; liquid; filled; coherence length; spatial intensity; variable aperture; input beam; path length; laser beam; delay line; coherence delay; liquid filled; beam homogenizer; length difference; /385/372/
Citation Formats
Rasmussen, Paul, and Bernhardt, Anthony. Coherence delay augmented laser beam homogenizer. United States: N. p., 1993.
Web.
Rasmussen, Paul, & Bernhardt, Anthony. Coherence delay augmented laser beam homogenizer. United States.
Rasmussen, Paul, and Bernhardt, Anthony. Fri .
"Coherence delay augmented laser beam homogenizer". United States. https://www.osti.gov/servlets/purl/868836.
@article{osti_868836,
title = {Coherence delay augmented laser beam homogenizer},
author = {Rasmussen, Paul and Bernhardt, Anthony},
abstractNote = {The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}
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