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Title: Coherence delay augmented laser beam homogenizer

Abstract

The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.

Inventors:
 [1];  [2]
  1. (Livermore, CA)
  2. (Berkeley, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
868836
Patent Number(s):
5224200
Assignee:
United States of America as represented by Department of Energy (Washington, DC) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
coherence; delay; augmented; laser; beam; homogenizer; geometrical; restrictions; relaxed; line; separate; coherent; input; components; path; length; difference; equal; multiple; respect; recombine; incoherently; output; resultant; uniform; spatial; intensity; suitable; microlithography; pantogography; disclosed; variable; aperture; liquid; filled; coherence length; spatial intensity; variable aperture; input beam; path length; laser beam; delay line; coherence delay; liquid filled; beam homogenizer; length difference; /385/372/

Citation Formats

Rasmussen, Paul, and Bernhardt, Anthony. Coherence delay augmented laser beam homogenizer. United States: N. p., 1993. Web.
Rasmussen, Paul, & Bernhardt, Anthony. Coherence delay augmented laser beam homogenizer. United States.
Rasmussen, Paul, and Bernhardt, Anthony. Fri . "Coherence delay augmented laser beam homogenizer". United States. https://www.osti.gov/servlets/purl/868836.
@article{osti_868836,
title = {Coherence delay augmented laser beam homogenizer},
author = {Rasmussen, Paul and Bernhardt, Anthony},
abstractNote = {The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

Patent:

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