Reflective optical imaging system for extreme ultraviolet wavelengths
Abstract
A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 .mu.m, and preferably less than 100 .mu.m. An image resolution of features less than 0.05-0.1 .mu.m, is obtained over a large area field; i.e., 25.4 mm .times.25.4 mm, with a distortion less than 0.1 of the resolution over the image field.
- Inventors:
-
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 868790
- Patent Number(s):
- 5212588
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- reflective; optical; imaging; extreme; ultraviolet; wavelengths; projection; reflection; mirrors; coaxial; configuration; reproduce; image; spherical; surfaces; provide; resolution; feature; 200; preferably; 100; features; 05-0; obtained; field; 25; times; distortion; reflective optical; optical imaging; extreme ultraviolet; reflection surface; ultraviolet wavelength; reflection optical; /359/
Citation Formats
Viswanathan, Vriddhachalam K, and Newnam, Brian E. Reflective optical imaging system for extreme ultraviolet wavelengths. United States: N. p., 1993.
Web.
Viswanathan, Vriddhachalam K, & Newnam, Brian E. Reflective optical imaging system for extreme ultraviolet wavelengths. United States.
Viswanathan, Vriddhachalam K, and Newnam, Brian E. Fri .
"Reflective optical imaging system for extreme ultraviolet wavelengths". United States. https://www.osti.gov/servlets/purl/868790.
@article{osti_868790,
title = {Reflective optical imaging system for extreme ultraviolet wavelengths},
author = {Viswanathan, Vriddhachalam K and Newnam, Brian E},
abstractNote = {A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 .mu.m, and preferably less than 100 .mu.m. An image resolution of features less than 0.05-0.1 .mu.m, is obtained over a large area field; i.e., 25.4 mm .times.25.4 mm, with a distortion less than 0.1 of the resolution over the image field.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}
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