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Title: Micro-machined resonator

A micro-machined resonator, typically quartz, with upper and lower micro-machinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrode through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.
Inventors:
 [1];  [1];  [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
868721
Assignee:
United States of America as represented by United States (Washington, DC) SNL
Patent Number(s):
US 5198716
Contract Number:
AC04-76DP00789
Research Org:
AT & T CORP
Country of Publication:
United States
Language:
English
Subject:
micro-machined; resonator; typically; quartz; upper; micro-machinable; support; covers; etched; lined; conductive; electrode; material; energy; trapping; mesa; capacitively; coupled; diaphragm; supported; cantilever; springs; layers; extending; surfaces; rigid; clock; applications; available; resilient; transducer; achieved; integral; event; bonded; form; hermetic; seal; interior; volume; filled; gas; evacuated; addition; oscillator; interface; circuitry; capacitively coupled; quartz resonator; electrode material; support layer; hermetic seal; micro-machined resonator; conductive electrode; cantilever spring; /310/