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Title: Apparatus and method to enhance X-ray production in laser produced plasmas

Abstract

Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.

Inventors:
 [1];  [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
868617
Patent Number(s):
5175757
Assignee:
Sandia Corporation-Org. 250 (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05G - X-RAY TECHNIQUE
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; method; enhance; x-ray; production; laser; produced; plasmas; generating; x-rays; instance; photolithography; steps; providing; target; irradiating; produces; train; sub-pulses; generate; producing; plasma; intensity; duration; vacuum; chamber; supported; including; storage; time; laser produced; vacuum chamber; x-ray production; generating x-rays; produced plasmas; produced plasma; /378/

Citation Formats

Augustoni, Arnold L, Gerardo, James B, and Raymond, Thomas D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States: N. p., 1992. Web.
Augustoni, Arnold L, Gerardo, James B, & Raymond, Thomas D. Apparatus and method to enhance X-ray production in laser produced plasmas. United States.
Augustoni, Arnold L, Gerardo, James B, and Raymond, Thomas D. Wed . "Apparatus and method to enhance X-ray production in laser produced plasmas". United States. https://www.osti.gov/servlets/purl/868617.
@article{osti_868617,
title = {Apparatus and method to enhance X-ray production in laser produced plasmas},
author = {Augustoni, Arnold L and Gerardo, James B and Raymond, Thomas D},
abstractNote = {Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {1}
}

Works referenced in this record:

Microlithography Using A Laser Plasma Created X-Ray Source
conference, June 1988


Recent Applications Of Laser-Produced Plasma X-Ray Sources
conference, October 1986


Quenched-Laser Operation Of A Littman Dye Oscillator
conference, June 1988


Submicron x‐ray lithography using laser‐produced plasma as a source
journal, October 1983


Laser plasma x‐ray sources for microlithography
journal, February 1988


X‐ray emission from plasmas generated by an XeCl laser picosecond pulse train
journal, December 1989


X-ray sources for microlithography created by laser radiation at λ=0.26 μm
journal, January 1987


Plasma x‐ray source for lithography generated by a ≊30 J, 30 ns KrF laser
journal, October 1988


Observation of enhanced x‐ray emission from long‐pulse‐width laser‐produced plasmas
journal, September 1989


Laser Created X-Ray Sources For Microlithography
conference, December 1987