Vacuum barrier for excimer lasers

Shurter, Roger P

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Title: Vacuum barrier for excimer lasers

Abstract

A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

Inventors:

Shurter, Roger P ^[1]

Jemez Springs, NM

Issue Date:: 1992-01-01

Research Org.:: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)

OSTI Identifier:: 868467

Patent Number(s):: 5147711

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
B32B15/08 - of synthetic resin
B32B15/20 - comprising aluminium or copper {
B32B2260/021 - Fibrous or filamentary layer
B32B2260/046 - Synthetic resin
B32B2311/12 - Copper
B32B2379/08 - Polyimides
B32B27/06 - as the main or only constituent of a layer, {which is next to another layer of the same or of a different material
B32B27/281 - {comprising polyimides}
B32B7/12 - using interposed adhesives or interposed materials with bonding properties

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J33/04 - Windows

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
H01S3/09707 - {using an electron or ion beam

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/24975 - No layer or component greater than 5 mils thick
Y10T428/249945 - Carbon or carbonaceous fiber
Y10T428/30 - Self-sustaining carbon mass or layer with impregnant or other layer
Y10T428/31681 - Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
Y10T428/31721 - Of polyimide

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DOE Contract Number:: W-7405-ENG-36

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: vacuum; barrier; excimer; lasers; separating; diode; pressurized; gas; laser; composite; material; comprising; layers; metal; copper; polyimide; matrix; graphite; fiber; yarns; impregnated; epoxy; stronger; conventional; foil; barriers; allows; electron; throughput; material comprising; composite material; pressurized gas; excimer laser; vacuum barrier; composite mat; graphite fiber; excimer lasers; /428/372/

Citation Formats


                    Shurter, Roger P. Vacuum barrier for excimer lasers.  United States: N. p., 1992. 
        Web.

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                    Shurter, Roger P. Vacuum barrier for excimer lasers.  United States.

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                    Shurter, Roger P. Wed .  
        "Vacuum barrier for excimer lasers".  United States.  https://www.osti.gov/servlets/purl/868467.

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@article{osti_868467,

  title        = {Vacuum barrier for excimer lasers},

  author       = {Shurter, Roger P},

  abstractNote = {A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1992},

  month        = {1}

}

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Works referenced in this record:

Performance improvements with advanced design foils in high-current electron beam diodes
journal, January 1991

Shurter, R.; Coogan, J.; Jones, M.
IEEE Transactions on Plasma Science, Vol. 19, Issue 5
https://doi.org/10.1109/27.108422

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A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput. 3 figs.
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Similar Records

Title: Vacuum barrier for excimer lasers

Abstract

Citation Formats

Performance improvements with advanced design foils in high-current electron beam diodes journal, January 1991

Performance improvements with advanced design foils in high-current electron beam diodes
journal, January 1991