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Title: Vacuum barrier for excimer lasers

Abstract

A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.

Inventors:
 [1]
  1. Jemez Springs, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
868467
Patent Number(s):
5147711
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B32 - LAYERED PRODUCTS B32B - LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
vacuum; barrier; excimer; lasers; separating; diode; pressurized; gas; laser; composite; material; comprising; layers; metal; copper; polyimide; matrix; graphite; fiber; yarns; impregnated; epoxy; stronger; conventional; foil; barriers; allows; electron; throughput; material comprising; composite material; pressurized gas; excimer laser; vacuum barrier; composite mat; graphite fiber; excimer lasers; /428/372/

Citation Formats

Shurter, Roger P. Vacuum barrier for excimer lasers. United States: N. p., 1992. Web.
Shurter, Roger P. Vacuum barrier for excimer lasers. United States.
Shurter, Roger P. Wed . "Vacuum barrier for excimer lasers". United States. https://www.osti.gov/servlets/purl/868467.
@article{osti_868467,
title = {Vacuum barrier for excimer lasers},
author = {Shurter, Roger P},
abstractNote = {A barrier for separating the vacuum area of a diode from the pressurized gas area of an excimer laser. The barrier is a composite material comprising layers of a metal such as copper, along with layers of polyimide, and a matrix of graphite fiber yarns impregnated with epoxy. The barrier is stronger than conventional foil barriers, and allows greater electron throughput.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {1}
}

Patent:

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