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Title: Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

Abstract

A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.

Inventors:
 [1];  [2]
  1. Cottage Grove, MN
  2. Maplewood, MN
Issue Date:
OSTI Identifier:
868415
Patent Number(s):
5135581
Application Number:
07/682,542
Assignee:
Minnesota Mining and Manufacturing Company (St. Paul, MN)
Patent Classifications (CPCs):
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
ZB-4-03056-2
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
light; transmissive; electrically; conductive; oxide; electrode; formed; presence; stabilizing; gas; doped; sputtering; precursor; substrate; temperature; 20; degree; 300; occurs; gaseous; mixture; including; oxide electrode; transmissive electrically; conductive oxide; gaseous mixture; electrically conductive; electrode formed; mixture including; light transmissive; stabilizing gas; sputtering gas; oxide precursor; /136/204/252/257/

Citation Formats

Tran, Nang T, and Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States: N. p., 1992. Web.
Tran, Nang T, & Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States.
Tran, Nang T, and Gilbert, James R. Wed . "Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas". United States. https://www.osti.gov/servlets/purl/868415.
@article{osti_868415,
title = {Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas},
author = {Tran, Nang T and Gilbert, James R},
abstractNote = {A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {1}
}

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Works referenced in this record:

Scattering matrix analysis of electron transport in disordered Aharonov–Bohm interferometers and ballistic constrictions
journal, November 1990


Transparent conducting electrodes on silicon
journal, May 1987


Preparation of transparent conducting zinc oxide films by reactive sputtering
journal, August 1987