skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

Abstract

A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.

Inventors:
 [1];  [2]
  1. (Cottage Grove, MN)
  2. (Maplewood, MN)
Issue Date:
OSTI Identifier:
868415
Patent Number(s):
5135581
Application Number:
07/682,542
Assignee:
Minnesota Mining and Manufacturing Company (St. Paul, MN) OSTI
DOE Contract Number:  
ZB-4-03056-2
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
light; transmissive; electrically; conductive; oxide; electrode; formed; presence; stabilizing; gas; doped; sputtering; precursor; substrate; temperature; 20; degree; 300; occurs; gaseous; mixture; including; oxide electrode; transmissive electrically; conductive oxide; gaseous mixture; electrically conductive; electrode formed; mixture including; light transmissive; stabilizing gas; sputtering gas; oxide precursor; /136/204/252/257/

Citation Formats

Tran, Nang T., and Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States: N. p., 1992. Web.
Tran, Nang T., & Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States.
Tran, Nang T., and Gilbert, James R. Tue . "Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas". United States. https://www.osti.gov/servlets/purl/868415.
@article{osti_868415,
title = {Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas},
author = {Tran, Nang T. and Gilbert, James R.},
abstractNote = {A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {8}
}

Patent:

Save / Share: