Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

Title: Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas

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Abstract

A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.

Inventors:

Tran, Nang T. ^[1]; Gilbert, James R. ^[2]

(Cottage Grove, MN)
(Maplewood, MN)

Issue Date:: 1992-08-04

OSTI Identifier:: 868415

Patent Number(s):: 5135581

Application Number:: 07/682,542

Assignee:: Minnesota Mining and Manufacturing Company (St. Paul, MN) OSTI

DOE Contract Number:: ZB-4-03056-2

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: light; transmissive; electrically; conductive; oxide; electrode; formed; presence; stabilizing; gas; doped; sputtering; precursor; substrate; temperature; 20; degree; 300; occurs; gaseous; mixture; including; oxide electrode; transmissive electrically; conductive oxide; gaseous mixture; electrically conductive; electrode formed; mixture including; light transmissive; stabilizing gas; sputtering gas; oxide precursor; /136/204/252/257/

Citation Formats


                    Tran, Nang T., and Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas.  United States: N. p., 1992. 
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                    Tran, Nang T., & Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas.  United States.

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                    Tran, Nang T., and Gilbert, James R. Tue .  
        "Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas".  United States.  https://www.osti.gov/servlets/purl/868415.

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@article{osti_868415,

  title        = {Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas},

  author       = {Tran, Nang T. and Gilbert, James R.},

  abstractNote = {A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1992},

  month        = {8}

}

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