Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas
Abstract
A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.
- Inventors:
-
- Cottage Grove, MN
- Maplewood, MN
- Issue Date:
- OSTI Identifier:
- 868415
- Patent Number(s):
- 5135581
- Application Number:
- 07/682,542
- Assignee:
- Minnesota Mining and Manufacturing Company (St. Paul, MN)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- ZB-4-03056-2
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- light; transmissive; electrically; conductive; oxide; electrode; formed; presence; stabilizing; gas; doped; sputtering; precursor; substrate; temperature; 20; degree; 300; occurs; gaseous; mixture; including; oxide electrode; transmissive electrically; conductive oxide; gaseous mixture; electrically conductive; electrode formed; mixture including; light transmissive; stabilizing gas; sputtering gas; oxide precursor; /136/204/252/257/
Citation Formats
Tran, Nang T, and Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States: N. p., 1992.
Web.
Tran, Nang T, & Gilbert, James R. Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas. United States.
Tran, Nang T, and Gilbert, James R. Wed .
"Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas". United States. https://www.osti.gov/servlets/purl/868415.
@article{osti_868415,
title = {Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas},
author = {Tran, Nang T and Gilbert, James R},
abstractNote = {A light transmissive, electrically conductive oxide is doped with a stabilizing gas such as H.sub.2 and H.sub.2 O. The oxide is formed by sputtering a light transmissive, electrically conductive oxide precursor onto a substrate at a temperature from 20.degree. C. to 300.degree. C. Sputtering occurs in a gaseous mixture including a sputtering gas and the stabilizing gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1992},
month = {1}
}
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