Thin-film spectroscopic sensor
Abstract
There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.
- Inventors:
-
- (Seattle, WA)
- Richland, WA
- Issue Date:
- Research Org.:
- Battelle Memorial Institute, Columbus, OH (United States)
- OSTI Identifier:
- 868141
- Patent Number(s):
- 5082629
- Assignee:
- Board of University of Washington (Seattle, WA); Battelle Development Corporation (Richland, WA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC06-76RL01830
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- thin-film; spectroscopic; sensor; disclosed; integrated; spectrometer; chemical; analysis; evanescent; electromagnetic; radiation; absorption; reaction; volume; comprises; noninteractive; waveguide; substrate; entrance; grating; exit; source; sensing; device; determine; pressure; concentration; species; mixture; comprising; interactive; radiation absorption; reaction volume; active waveguide; radiation sensing; chemical analysis; chemical sensor; electromagnetic radiation; chemical species; radiation source; sensing device; mixture comprising; chemical specie; spectrometer comprises; evanescent electromagnetic; /422/356/385/
Citation Formats
Burgess, Jr., Lloyd W., and Goldman, Don S. Thin-film spectroscopic sensor. United States: N. p., 1992.
Web.
Burgess, Jr., Lloyd W., & Goldman, Don S. Thin-film spectroscopic sensor. United States.
Burgess, Jr., Lloyd W., and Goldman, Don S. Wed .
"Thin-film spectroscopic sensor". United States. https://www.osti.gov/servlets/purl/868141.
@article{osti_868141,
title = {Thin-film spectroscopic sensor},
author = {Burgess, Jr., Lloyd W. and Goldman, Don S},
abstractNote = {There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1992},
month = {Wed Jan 01 00:00:00 EST 1992}
}
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