Ionization chamber dosimeter

Renner, Tim R; Nyman, Mark A; Stradtner, Ronald

Title: Ionization chamber dosimeter

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Abstract

A method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.

Inventors:

Renner, Tim R ^[1]; Nyman, Mark A ^[1]; Stradtner, Ronald ^[2]

Berkeley, CA
Kensington, CA

Issue Date:: 1991-01-01

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

OSTI Identifier:: 868046

Patent Number(s):: 5061216

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J47/001 - {Details}

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: ionization; chamber; dosimeter; method; fabricating; collecting; array; type; utilizing; plural; discrete; elements; formed; uniform; surface; forming; insulating; layer; aperture; frame; surfaces; predetermined; pattern; holes; plating; simultaneously; tilting; rotating; plate-through; aligned; masking; patterned; etching; provides; interconnects; copper; leads; provided; external; circuitry; external circuit; insulating layer; ionization chamber; predetermined pattern; elements formed; external circuitry; chamber dosimeter; collecting surface; type utilizing; /445/427/

Citation Formats


                    Renner, Tim R, Nyman, Mark A, and Stradtner, Ronald. Ionization chamber dosimeter.  United States: N. p., 1991. 
        Web.

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                    Renner, Tim R, Nyman, Mark A, & Stradtner, Ronald. Ionization chamber dosimeter.  United States.

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                    Renner, Tim R, Nyman, Mark A, and Stradtner, Ronald. Tue .  
        "Ionization chamber dosimeter".  United States.  https://www.osti.gov/servlets/purl/868046.

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@article{osti_868046,

  title        = {Ionization chamber dosimeter},

  author       = {Renner, Tim R and Nyman, Mark A and Stradtner, Ronald},

  abstractNote = {A method for fabricating an ion chamber dosimeter collecting array of the type utilizing plural discrete elements formed on a uniform collecting surface which includes forming a thin insulating layer over an aperture in a frame having surfaces, forming a predetermined pattern of through holes in the layer, plating both surfaces of the layer and simultaneously tilting and rotating the frame for uniform plate-through of the holes between surfaces. Aligned masking and patterned etching of the surfaces provides interconnects between the through holes and copper leads provided to external circuitry.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1991},

  month        = {1}

}

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