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Title: Backscattering spectrometry device for identifying unknown elements present in a workpiece

Abstract

A backscattering spectrometry method and device for identifying and quantifying impurities in a workpiece during processing and manufacturing of that workpiece. While the workpiece is implanted with an ion beam, that same ion beam backscatters resulting from collisions with known atoms and with impurities within the workpiece. Those ions backscatter along a predetermined scattering angle and are filtered using a self-supporting filter to stop the ions with a lower energy because they collided with the known atoms of the workpiece of a smaller mass. Those ions which pass through the filter have a greater energy resulting from impact with impurities having a greater mass than the known atoms of the workpiece. A detector counts the number and measures the energy of the ions which pass through the filter. From the energy determination and knowledge of the scattering angle, a mass calculation determines the identity, and from the number and solid angle of the scattering angle, a relative concentration of the impurity is obtained.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
AT & T CORP
OSTI Identifier:
868039
Patent Number(s):
5059785
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
backscattering; spectrometry; device; identifying; elements; workpiece; method; quantifying; impurities; processing; manufacturing; implanted; beam; backscatters; resulting; collisions; atoms; backscatter; predetermined; scattering; angle; filtered; self-supporting; filter; stop; energy; collided; mass; pass; impact; detector; counts; measures; determination; knowledge; calculation; determines; identity; solid; relative; concentration; impurity; obtained; solid angle; relative concentration; scattering angle; energy resulting; backscattering spectrometry; /250/

Citation Formats

Doyle, Barney L, and Knapp, James A. Backscattering spectrometry device for identifying unknown elements present in a workpiece. United States: N. p., 1991. Web.
Doyle, Barney L, & Knapp, James A. Backscattering spectrometry device for identifying unknown elements present in a workpiece. United States.
Doyle, Barney L, and Knapp, James A. Tue . "Backscattering spectrometry device for identifying unknown elements present in a workpiece". United States. https://www.osti.gov/servlets/purl/868039.
@article{osti_868039,
title = {Backscattering spectrometry device for identifying unknown elements present in a workpiece},
author = {Doyle, Barney L and Knapp, James A},
abstractNote = {A backscattering spectrometry method and device for identifying and quantifying impurities in a workpiece during processing and manufacturing of that workpiece. While the workpiece is implanted with an ion beam, that same ion beam backscatters resulting from collisions with known atoms and with impurities within the workpiece. Those ions backscatter along a predetermined scattering angle and are filtered using a self-supporting filter to stop the ions with a lower energy because they collided with the known atoms of the workpiece of a smaller mass. Those ions which pass through the filter have a greater energy resulting from impact with impurities having a greater mass than the known atoms of the workpiece. A detector counts the number and measures the energy of the ions which pass through the filter. From the energy determination and knowledge of the scattering angle, a mass calculation determines the identity, and from the number and solid angle of the scattering angle, a relative concentration of the impurity is obtained.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {1}
}

Patent:

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