Poly(silyl silane) homo and copolymers
Abstract
Poly(silyl silanes) have been prepared. They have high photosensitivity and excellent resistance to oxygen-reactive ion etching processes. They are useful as photodepolymerizable photoresists, barrier layers, etc.
- Inventors:
-
- 2208 Lester Dr. NE., Albuquerque, NM 87112
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 867936
- Patent Number(s):
- 5039593
- Assignee:
- Zeigler, John K. (2208 Lester Dr. NE., Albuquerque, NM 87112)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C08 - ORGANIC MACROMOLECULAR COMPOUNDS C08G - MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- poly; silyl; silane; homo; copolymers; silanes; prepared; photosensitivity; excellent; resistance; oxygen-reactive; etching; processes; useful; photodepolymerizable; photoresists; barrier; layers; etc; etching process; barrier layer; barrier layers; silyl silanes; silyl silane; excellent resistance; etching processes; photodepolymerizable photoresists; /430/
Citation Formats
Zeigler, John K. Poly(silyl silane) homo and copolymers. United States: N. p., 1991.
Web.
Zeigler, John K. Poly(silyl silane) homo and copolymers. United States.
Zeigler, John K. Tue .
"Poly(silyl silane) homo and copolymers". United States. https://www.osti.gov/servlets/purl/867936.
@article{osti_867936,
title = {Poly(silyl silane) homo and copolymers},
author = {Zeigler, John K},
abstractNote = {Poly(silyl silanes) have been prepared. They have high photosensitivity and excellent resistance to oxygen-reactive ion etching processes. They are useful as photodepolymerizable photoresists, barrier layers, etc.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}