Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements
Abstract
Scavenger compositions are disclosed, which have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconductor devices. Gas sorption processes including the contacting of Group II-VII gaseous compounds with such scavenger compositions are likewise disclosed, together with critical space velocity contacting conditions pertaining thereto. Further described are gas contacting apparatus, including mesh structures which may be deployed in gas contacting vessels containing such scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel in the gas stream undergoing treatment. A reticulate heat transfer structure also is disclosed, for dampening localized exothermic reaction fronts when gas mixtures comprising Group II-VII constituents are contacted with the scavenger compositions in bulk sorption contacting vessels according to the invention.
- Inventors:
-
- New Milford, CT
- Danbury, CT
- Stamford, CT
- Issue Date:
- Research Org.:
- Advanced Technology Materials
- OSTI Identifier:
- 867931
- Patent Number(s):
- 5037624
- Application Number:
- 07/295,419
- Assignee:
- Advanced Technology Materials Inc. (Danbury, CT)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01D - SEPARATION
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
- DOE Contract Number:
- AC01-87ER80469
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- composition; apparatus; process; sorption; gaseous; compounds; ii-vii; elements; scavenger; compositions; disclosed; utility; effecting; sorptive; removal; hazardous; gases; containing; periodic; table; widely; encountered; manufacture; semiconducting; materials; semiconductor; devices; gas; processes; including; contacting; likewise; critical; space; velocity; conditions; pertaining; thereto; described; mesh; structures; deployed; vessels; prevent; solids; introduced; discharged; vessel; stream; undergoing; treatment; reticulate; heat; transfer; structure; dampening; localized; exothermic; reaction; fronts; mixtures; comprising; constituents; contacted; bulk; according; mixtures comprising; exothermic reaction; conducting material; gas mixtures; gas stream; heat transfer; semiconductor device; gas mixture; semiconductor devices; periodic table; space velocity; scavenger composition; semiconducting materials; processes including; reaction front; semiconducting material; gases containing; transfer structure; gaseous compounds; vessels containing; hazardous gases; gas contact; ii-vii elements; gaseous compound; vessels contain; sorption process; /423/422/502/
Citation Formats
Tom, Glenn M, McManus, James V, and Luxon, Bruce A. Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements. United States: N. p., 1991.
Web.
Tom, Glenn M, McManus, James V, & Luxon, Bruce A. Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements. United States.
Tom, Glenn M, McManus, James V, and Luxon, Bruce A. Tue .
"Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements". United States. https://www.osti.gov/servlets/purl/867931.
@article{osti_867931,
title = {Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements},
author = {Tom, Glenn M and McManus, James V and Luxon, Bruce A},
abstractNote = {Scavenger compositions are disclosed, which have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconductor devices. Gas sorption processes including the contacting of Group II-VII gaseous compounds with such scavenger compositions are likewise disclosed, together with critical space velocity contacting conditions pertaining thereto. Further described are gas contacting apparatus, including mesh structures which may be deployed in gas contacting vessels containing such scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel in the gas stream undergoing treatment. A reticulate heat transfer structure also is disclosed, for dampening localized exothermic reaction fronts when gas mixtures comprising Group II-VII constituents are contacted with the scavenger compositions in bulk sorption contacting vessels according to the invention.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {8}
}