UV absorption control of thin film growth
Abstract
A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.
- Inventors:
-
- Albuquerque, NM
- Hopewell Junction, NY
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 867908
- Patent Number(s):
- 5032435
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- absorption; control; film; growth; monitoring; controlling; rate; films; atmosphere; reactant; gases; measures; absorbance; calculates; partial; pressure; flow; controlled; response; reactant gases; film growth; partial pressure; reactant gas; /427/118/
Citation Formats
Biefeld, Robert M, Hebner, Gregory A, Killeen, Kevin P, and Zuhoski, Steven P. UV absorption control of thin film growth. United States: N. p., 1991.
Web.
Biefeld, Robert M, Hebner, Gregory A, Killeen, Kevin P, & Zuhoski, Steven P. UV absorption control of thin film growth. United States.
Biefeld, Robert M, Hebner, Gregory A, Killeen, Kevin P, and Zuhoski, Steven P. Tue .
"UV absorption control of thin film growth". United States. https://www.osti.gov/servlets/purl/867908.
@article{osti_867908,
title = {UV absorption control of thin film growth},
author = {Biefeld, Robert M and Hebner, Gregory A and Killeen, Kevin P and Zuhoski, Steven P},
abstractNote = {A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}
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