Apparatus for coating a surface with a metal utilizing a plasma source

Brown, Ian G; MacGill, Robert A; Galvin, James E

Title: Apparatus for coating a surface with a metal utilizing a plasma source

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Abstract

An apparatus and method for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time.

Inventors:

Brown, Ian G ^[1]; MacGill, Robert A ^[2]; Galvin, James E ^[3]

Berkeley, CA
Richmond, CA
Emeryville, CA

Issue Date:: 1991-01-01

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

OSTI Identifier:: 867803

Patent Number(s):: 5013578

Assignee:: University of California (Berkeley, CA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/325 - {Electric arc evaporation}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J27/22 - Metal ion sources
H01J37/32 - Gas-filled discharge tubes, {e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions}

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: apparatus; coating; surface; metal; utilizing; plasma; source; method; layering; vapor; vacuum; trigger; mechanism; actuating; pulsed; mode; predetermined; rate; substrate; coated; layered; supported; position; chamber; electrically; biased; selected; period; time; operation; pulsing; electrical; biasing; synchronized; periods; pulsed mode; electrical bias; metal vapor; plasma source; vacuum chamber; predetermined rate; trigger mechanism; vacuum vapor; vapor vacuum; selected period; metal vacuum; metal utilizing; electrically biased; electrical biasing; /427/118/204/

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                    Brown, Ian G, MacGill, Robert A, and Galvin, James E. Apparatus for coating a surface with a metal utilizing a plasma source.  United States: N. p., 1991. 
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                    Brown, Ian G, MacGill, Robert A, & Galvin, James E. Apparatus for coating a surface with a metal utilizing a plasma source.  United States.

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                    Brown, Ian G, MacGill, Robert A, and Galvin, James E. Tue .  
        "Apparatus for coating a surface with a metal utilizing a plasma source".  United States.  https://www.osti.gov/servlets/purl/867803.

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@article{osti_867803,

  title        = {Apparatus for coating a surface with a metal utilizing a plasma source},

  author       = {Brown, Ian G and MacGill, Robert A and Galvin, James E},

  abstractNote = {An apparatus and method for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1991},

  month        = {1}

}

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