Acoustic microscope surface inspection system and method
Abstract
An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.
- Inventors:
-
- Palo Alto, CA
- Chilly-Mazarin, FR
- Seattle, WA
- Issue Date:
- Research Org.:
- Stanford Univ., CA (United States)
- OSTI Identifier:
- 867717
- Patent Number(s):
- 4995259
- Assignee:
- Board of Trustees of Leland Stanford Junior University (Stanford, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G01 - MEASURING G01S - RADIO DIRECTION-FINDING
- DOE Contract Number:
- FG03-84ER45157
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- acoustic; microscope; surface; inspection; method; pulses; frequency; electrical; energy; applied; transducer; forms; focuses; selected; location; receives; generates; phase; signal; stepped; respected; reference; output; generated; indicative; scanned; provide; signals; representative; plurality; locations; signals representative; acoustic microscope; provide output; output signals; reference signal; electrical energy; electrical signal; output signal; acoustic energy; electrical pulses; selected location; surface location; signal pulses; signal pulse; electrical pulse; microscope surface; generates electrical; frequency electrical; surface inspection; frequency electric; /73/
Citation Formats
Khuri-Yakub, Butrus T, Parent, Philippe, and Reinholdtsen, Paul A. Acoustic microscope surface inspection system and method. United States: N. p., 1991.
Web.
Khuri-Yakub, Butrus T, Parent, Philippe, & Reinholdtsen, Paul A. Acoustic microscope surface inspection system and method. United States.
Khuri-Yakub, Butrus T, Parent, Philippe, and Reinholdtsen, Paul A. Tue .
"Acoustic microscope surface inspection system and method". United States. https://www.osti.gov/servlets/purl/867717.
@article{osti_867717,
title = {Acoustic microscope surface inspection system and method},
author = {Khuri-Yakub, Butrus T and Parent, Philippe and Reinholdtsen, Paul A},
abstractNote = {An acoustic microscope surface inspection system and method in which pulses of high frequency electrical energy are applied to a transducer which forms and focuses acoustic energy onto a selected location on the surface of an object and receives energy from the location and generates electrical pulses. The phase of the high frequency electrical signal pulses are stepped with respected to the phase of a reference signal at said location. An output signal is generated which is indicative of the surface of said selected location. The object is scanned to provide output signals representative of the surface at a plurality of surface locations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 1991},
month = {Tue Jan 01 00:00:00 EST 1991}
}
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