skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: System for measuring film thickness

Abstract

A system for determining the thicknesses of thin films of materials exhibiting fluorescence in response to exposure to excitation energy from a suitable source of such energy. A section of film is illuminated with a fixed level of excitation energy from a source such as an argon ion laser emitting blue-green light. The amount of fluorescent light produced by the film over a limited area within the section so illuminated is then measured using a detector such as a photomultiplier tube. Since the amount of fluorescent light produced is a function of the thicknesses of thin films, the thickness of a specific film can be determined by comparing the intensity of fluorescent light produced by this film with the intensity of light produced by similar films of known thicknesses in response to the same amount of excitation energy. The preferred embodiment of the invention uses fiber optic probes in measuring the thicknesses of oil films on the operational components of machinery which are ordinarily obscured from view.

Inventors:
 [1];  [2];  [2];  [2]
  1. (West Richland, WA)
  2. (Richland, WA)
Issue Date:
Research Org.:
BATTELLE MEMORIAL INSTITUTE
OSTI Identifier:
867523
Patent Number(s):
4956558
Assignee:
Battelle Memorial Institute (Richland, WA) PNNL
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
measuring; film; thickness; determining; thicknesses; films; materials; exhibiting; fluorescence; response; exposure; excitation; energy; suitable; source; section; illuminated; fixed; level; argon; laser; emitting; blue-green; light; amount; fluorescent; produced; limited; measured; detector; photomultiplier; tube; function; specific; determined; comparing; intensity; similar; preferred; embodiment; fiber; optic; probes; oil; operational; components; machinery; ordinarily; obscured; view; light produced; excitation energy; fluorescent light; film thickness; fiber optic; preferred embodiment; photomultiplier tube; optic probe; suitable source; oil film; fixed level; materials exhibiting; measuring film; multiplier tube; optic probes; /250/

Citation Formats

Batishko, Charles R., Kirihara, Leslie J., Peters, Timothy J., and Rasmussen, Donald E. System for measuring film thickness. United States: N. p., 1990. Web.
Batishko, Charles R., Kirihara, Leslie J., Peters, Timothy J., & Rasmussen, Donald E. System for measuring film thickness. United States.
Batishko, Charles R., Kirihara, Leslie J., Peters, Timothy J., and Rasmussen, Donald E. Mon . "System for measuring film thickness". United States. https://www.osti.gov/servlets/purl/867523.
@article{osti_867523,
title = {System for measuring film thickness},
author = {Batishko, Charles R. and Kirihara, Leslie J. and Peters, Timothy J. and Rasmussen, Donald E.},
abstractNote = {A system for determining the thicknesses of thin films of materials exhibiting fluorescence in response to exposure to excitation energy from a suitable source of such energy. A section of film is illuminated with a fixed level of excitation energy from a source such as an argon ion laser emitting blue-green light. The amount of fluorescent light produced by the film over a limited area within the section so illuminated is then measured using a detector such as a photomultiplier tube. Since the amount of fluorescent light produced is a function of the thicknesses of thin films, the thickness of a specific film can be determined by comparing the intensity of fluorescent light produced by this film with the intensity of light produced by similar films of known thicknesses in response to the same amount of excitation energy. The preferred embodiment of the invention uses fiber optic probes in measuring the thicknesses of oil films on the operational components of machinery which are ordinarily obscured from view.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}

Patent:

Save / Share: