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Title: Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof

Abstract

An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al.sub.x N.sub.y O.sub.z layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al.sub.x N.sub.y O.sub.z layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.

Inventors:
 [1]
  1. (Lexington, MA)
Issue Date:
Research Org.:
LOCKHEED MARTIN ENRGY SYST INC
OSTI Identifier:
867500
Patent Number(s):
4950558
Assignee:
GTE Laboratories Incorporated (Waltham, MA) ORNL
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
oxidation; resistant; temperature; thermal; cycling; coatings; silicon-based; substrates; process; production; coated; ceramic; article; heat; engine; applications; substrate; material; silicon; nitride-; carbide-based; monolithic; composite; coating; graded; layers; intermediate; aln; z; layer; aluminum; oxide; zirconium; outer; composition; changes; gradually; deposited; cvd; depositing; disclosed; resistant coating; temperature thermal; ceramic heat; ceramic article; outer layer; heat engine; thermal cycling; aluminum oxide; silicon nitride; silicon carbide; composite material; oxide layer; zirconium oxide; oxidation resistant; resistant coatings; coated ceramic; silicon carbide-based; silicon nitride-; silicon-based substrates; composite mat; graded coating; engine applications; cycling resistant; /428/

Citation Formats

Sarin, Vinod K. Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof. United States: N. p., 1990. Web.
Sarin, Vinod K. Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof. United States.
Sarin, Vinod K. Mon . "Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof". United States. https://www.osti.gov/servlets/purl/867500.
@article{osti_867500,
title = {Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof},
author = {Sarin, Vinod K.},
abstractNote = {An oxidation resistant, high temperature thermal cycling resistant coated ceramic article for ceramic heat engine applications. The substrate is a silicon-based material, i.e. a silicon nitride- or silicon carbide-based monolithic or composite material. The coating is a graded coating of at least two layers: an intermediate AlN or Al.sub.x N.sub.y O.sub.z layer and an aluminum oxide or zirconium oxide outer layer. The composition of the coating changes gradually from that of the substrate to that of the AlN or Al.sub.x N.sub.y O.sub.z layer and further to the composition of the aluminum oxide or zirconium oxide outer layer. Other layers may be deposited over the aluminum oxide layer. A CVD process for depositing the graded coating on the substrate is also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}

Patent:

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