Multilayer diffraction grating
Abstract
This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages.
- Inventors:
-
- (Palo Alto, CA)
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 867329
- Patent Number(s):
- 4915463
- Assignee:
- United States of America as represented by Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multilayer; diffraction; grating; reflection; functions; x-ray; vuv; wavelengths; normal; angles; incidence; novel; comprised; laminar; period; flat-topped; bars; multiplicity; layered; synthetic; microstructures; alternating; flat; layers; materials; disposed; tops; embodiment; base; approximate; range; 000; 50; angstroms; 10; 400; cooperatively; interact; provide; beneficial; instrumentational; advantages; approximate range; diffraction grating; reflection diffraction; /359/
Citation Formats
Barbee, Jr., Troy W. Multilayer diffraction grating. United States: N. p., 1990.
Web.
Barbee, Jr., Troy W. Multilayer diffraction grating. United States.
Barbee, Jr., Troy W. Mon .
"Multilayer diffraction grating". United States. https://www.osti.gov/servlets/purl/867329.
@article{osti_867329,
title = {Multilayer diffraction grating},
author = {Barbee, Jr., Troy W.},
abstractNote = {This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}