Scanning tunneling microscope nanoetching method
Abstract
A method is described for forming uniform nanometer sized depressions on the surface of a conducting substrate. A tunneling tip is used to apply tunneling current density sufficient to vaporize a localized area of the substrate surface. The resulting depressions or craters in the substrate surface can be formed in information encoding patterns readable with a scanning tunneling microscope.
- Inventors:
- Issue Date:
- Research Org.:
- Purdue Univ., West Lafayette, IN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 867251
- Patent Number(s):
- 4896044
- Application Number:
- 07/312,768
- Assignee:
- Purdue Research Foundation (West Lafayette, IN)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23F - NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
- DOE Contract Number:
- FG02-84ER45162
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 1989 Feb 17
- Country of Publication:
- United States
- Language:
- English
- Subject:
- /250/216/347/369/
Citation Formats
Li, Yun-Zhong, Reifenberger, Ronald G., and Andres, Ronald P. Scanning tunneling microscope nanoetching method. United States: N. p., 1990.
Web.
Li, Yun-Zhong, Reifenberger, Ronald G., & Andres, Ronald P. Scanning tunneling microscope nanoetching method. United States.
Li, Yun-Zhong, Reifenberger, Ronald G., and Andres, Ronald P. Mon .
"Scanning tunneling microscope nanoetching method". United States. https://www.osti.gov/servlets/purl/867251.
@article{osti_867251,
title = {Scanning tunneling microscope nanoetching method},
author = {Li, Yun-Zhong and Reifenberger, Ronald G. and Andres, Ronald P.},
abstractNote = {A method is described for forming uniform nanometer sized depressions on the surface of a conducting substrate. A tunneling tip is used to apply tunneling current density sufficient to vaporize a localized area of the substrate surface. The resulting depressions or craters in the substrate surface can be formed in information encoding patterns readable with a scanning tunneling microscope.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}
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