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Title: Scanning tunneling microscope nanoetching method

Abstract

A method is described for forming uniform nanometer sized depressions on the surface of a conducting substrate. A tunneling tip is used to apply tunneling current density sufficient to vaporize a localized area of the substrate surface. The resulting depressions or craters in the substrate surface can be formed in information encoding patterns readable with a scanning tunneling microscope.

Inventors:
; ;
Issue Date:
Research Org.:
Purdue Univ., West Lafayette, IN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
867251
Patent Number(s):
4896044
Application Number:
07/312,768
Assignee:
Purdue Research Foundation (West Lafayette, IN)
Patent Classifications (CPCs):
G - PHYSICS G11 - INFORMATION STORAGE G11B - INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG02-84ER45162
Resource Type:
Patent
Resource Relation:
Patent File Date: 1989 Feb 17
Country of Publication:
United States
Language:
English
Subject:
/250/216/347/369/

Citation Formats

Li, Yun-Zhong, Reifenberger, Ronald G., and Andres, Ronald P. Scanning tunneling microscope nanoetching method. United States: N. p., 1990. Web.
Li, Yun-Zhong, Reifenberger, Ronald G., & Andres, Ronald P. Scanning tunneling microscope nanoetching method. United States.
Li, Yun-Zhong, Reifenberger, Ronald G., and Andres, Ronald P. Mon . "Scanning tunneling microscope nanoetching method". United States. https://www.osti.gov/servlets/purl/867251.
@article{osti_867251,
title = {Scanning tunneling microscope nanoetching method},
author = {Li, Yun-Zhong and Reifenberger, Ronald G. and Andres, Ronald P.},
abstractNote = {A method is described for forming uniform nanometer sized depressions on the surface of a conducting substrate. A tunneling tip is used to apply tunneling current density sufficient to vaporize a localized area of the substrate surface. The resulting depressions or craters in the substrate surface can be formed in information encoding patterns readable with a scanning tunneling microscope.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}

Patent:

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