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Title: Surface profiling interferometer

Abstract

The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.

Inventors:
 [1];  [2]
  1. (P.O. Box 385, Upton, NY 11973)
  2. (Hefei Synchrotron Radiation Laboratory, University of Science and, Hefei, Anhui, CN)
Issue Date:
Research Org.:
ASSOC UNIVERSITIES INC
OSTI Identifier:
867195
Patent Number(s):
4884697
Assignee:
Takacs, Peter Z. (P.O. Box 385, Upton, NY 11973);Qian, Shi-Nan (Hefei Synchrotron Radiation Laboratory, University of Science and, Hefei, Anhui, CN) BNL
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; profiling; interferometer; design; long-trace; profiler; non-contact; measurement; profile; slope; error; curvature; cylindrical; synchrotron; radiation; sr; mirrors; optical; based; concept; pencil-beam; inherent; depth-of-field; key; feature; zero-path-difference; beam; splitter; separates; laser; colinear; variable-separation; probe; beams; linear; array; detector; record; interference; fringe; image; analysis; location; function; scan; position; allows; reconstruct; head; mounted; air; bearing; slide; capability; measure; aspheric; optics; typical; encountered; applications; novel; transverse; outrigger; provides; information; relative; alignment; axis; cylinder; optic; symmetry; air bearing; surface profile; linear array; probe beam; beam splitter; laser beam; provides information; synchrotron radiation; surface profiler; surface profiling; aspheric optics; array detector; interference fringe; ray detector; non-contact measurement; slope error; key feature; /356/

Citation Formats

Takacs, Peter Z., and Qian, Shi-Nan. Surface profiling interferometer. United States: N. p., 1989. Web.
Takacs, Peter Z., & Qian, Shi-Nan. Surface profiling interferometer. United States.
Takacs, Peter Z., and Qian, Shi-Nan. Sun . "Surface profiling interferometer". United States. https://www.osti.gov/servlets/purl/867195.
@article{osti_867195,
title = {Surface profiling interferometer},
author = {Takacs, Peter Z. and Qian, Shi-Nan},
abstractNote = {The design of a long-trace surface profiler for the non-contact measurement of surface profile, slope error and curvature on cylindrical synchrotron radiation (SR) mirrors. The optical system is based upon the concept of a pencil-beam interferometer with an inherent large depth-of-field. The key feature of the optical system is the zero-path-difference beam splitter, which separates the laser beam into two colinear, variable-separation probe beams. A linear array detector is used to record the interference fringe in the image, and analysis of the fringe location as a function of scan position allows one to reconstruct the surface profile. The optical head is mounted on an air bearing slide with the capability to measure long aspheric optics, typical of those encountered in SR applications. A novel feature of the optical system is the use of a transverse "outrigger" beam which provides information on the relative alignment of the scan axis to the cylinder optic symmetry axis.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {1}
}

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