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Title: X-ray beamsplitter

Abstract

An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.

Inventors:
 [1];  [2];  [3];  [4]
  1. Livermore, CA
  2. Mountain View, CA
  3. Modesto, CA
  4. (Palo Alto, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
867118
Patent Number(s):
4870648
Assignee:
United States Department of Energy (Washington, DC)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
x-ray; beamsplitter; splits; beam; coherent; reflecting; transmitting; fraction; incident; applications; interferometry; holography; manipulation; laser; cavity; output; couplers; formed; wavelength; selective; multilayer; film; supported; transparent; membrane; resonantly; transmits; reflects; x-rays; interference; effects; 5-50; pairs; alternate; layers; period; 20-250; support; 10-200; nm; silicon; nitride; boron; structure; window; substrate; forming; solid; leave; free-standing; x-ray beams; output coupler; support membrane; laser cavity; x-ray beam; x-ray laser; silicon nitride; boron nitride; incident beam; solid substrate; transparent membrane; x-ray beamsplitter; interference effect; ray beams; beam manipulation; /372/378/

Citation Formats

Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, and Barbee, Jr., Troy W. X-ray beamsplitter. United States: N. p., 1989. Web.
Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, & Barbee, Jr., Troy W. X-ray beamsplitter. United States.
Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, and Barbee, Jr., Troy W. Sun . "X-ray beamsplitter". United States. https://www.osti.gov/servlets/purl/867118.
@article{osti_867118,
title = {X-ray beamsplitter},
author = {Ceglio, Natale M and Stearns, Daniel S and Hawryluk, Andrew M and Barbee, Jr., Troy W.},
abstractNote = {An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {1}
}