X-ray beamsplitter
Abstract
An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.
- Inventors:
-
- Livermore, CA
- Mountain View, CA
- Modesto, CA
- (Palo Alto, CA)
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 867118
- Patent Number(s):
- 4870648
- Assignee:
- United States Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- x-ray; beamsplitter; splits; beam; coherent; reflecting; transmitting; fraction; incident; applications; interferometry; holography; manipulation; laser; cavity; output; couplers; formed; wavelength; selective; multilayer; film; supported; transparent; membrane; resonantly; transmits; reflects; x-rays; interference; effects; 5-50; pairs; alternate; layers; period; 20-250; support; 10-200; nm; silicon; nitride; boron; structure; window; substrate; forming; solid; leave; free-standing; x-ray beams; output coupler; support membrane; laser cavity; x-ray beam; x-ray laser; silicon nitride; boron nitride; incident beam; solid substrate; transparent membrane; x-ray beamsplitter; interference effect; ray beams; beam manipulation; /372/378/
Citation Formats
Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, and Barbee, Jr., Troy W. X-ray beamsplitter. United States: N. p., 1989.
Web.
Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, & Barbee, Jr., Troy W. X-ray beamsplitter. United States.
Ceglio, Natale M, Stearns, Daniel S, Hawryluk, Andrew M, and Barbee, Jr., Troy W. Sun .
"X-ray beamsplitter". United States. https://www.osti.gov/servlets/purl/867118.
@article{osti_867118,
title = {X-ray beamsplitter},
author = {Ceglio, Natale M and Stearns, Daniel S and Hawryluk, Andrew M and Barbee, Jr., Troy W.},
abstractNote = {An x-ray beamsplitter which splits an x-ray beam into two coherent parts by reflecting and transmitting some fraction of an incident beam has applications for x-ray interferometry, x-ray holography, x-ray beam manipulation, and x-ray laser cavity output couplers. The beamsplitter is formed of a wavelength selective multilayer thin film supported by a very thin x-ray transparent membrane. The beamsplitter resonantly transmits and reflects x-rays through thin film interference effects. A thin film is formed of 5-50 pairs of alternate Mo/Si layers with a period of 20-250 A. The support membrane is 10-200 nm of silicon nitride or boron nitride. The multilayer/support membrane structure is formed across a window in a substrate by first forming the structure on a solid substrate and then forming a window in the substrate to leave a free-standing structure over the window.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1989},
month = {Sun Jan 01 00:00:00 EST 1989}
}