Inductively coupled helium plasma torch
Abstract
An inductively coupled plasma torch including a base member, a plasma tube and a threaded insert member within the plasma tube for directing the plasma gas in a tangential flow pattern. The design of the torch eliminates the need for a separate coolant gas tube. The torch can be readily assembled and disassembled with a high degree of alignment accuracy.
- Inventors:
-
- Potomac, MD
- Washington, DC
- Alexandria, VA
- Issue Date:
- Research Org.:
- GEORGE WASHINGTON UNIVERSITY
- OSTI Identifier:
- 866976
- Patent Number(s):
- 4833294
- Assignee:
- Research Corporation (Tucson, AZ)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
- DOE Contract Number:
- AS05-84ER13172
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- inductively; coupled; helium; plasma; torch; including; base; tube; threaded; insert; directing; gas; tangential; flow; pattern; design; eliminates; separate; coolant; readily; assembled; disassembled; degree; alignment; accuracy; coolant gas; plasma tube; inductively coupled; plasma torch; coupled plasma; plasma gas; flow pattern; torch including; helium plasma; threaded insert; /219/315/356/
Citation Formats
Montaser, Akbar, Chan, Shi-Kit, and Van Hoven, Raymond L. Inductively coupled helium plasma torch. United States: N. p., 1989.
Web.
Montaser, Akbar, Chan, Shi-Kit, & Van Hoven, Raymond L. Inductively coupled helium plasma torch. United States.
Montaser, Akbar, Chan, Shi-Kit, and Van Hoven, Raymond L. Sun .
"Inductively coupled helium plasma torch". United States. https://www.osti.gov/servlets/purl/866976.
@article{osti_866976,
title = {Inductively coupled helium plasma torch},
author = {Montaser, Akbar and Chan, Shi-Kit and Van Hoven, Raymond L},
abstractNote = {An inductively coupled plasma torch including a base member, a plasma tube and a threaded insert member within the plasma tube for directing the plasma gas in a tangential flow pattern. The design of the torch eliminates the need for a separate coolant gas tube. The torch can be readily assembled and disassembled with a high degree of alignment accuracy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {1}
}
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