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Title: Method for manufacturing electrical contacts for a thin-film semiconductor device

Abstract

A method of fabricating spaced-apart back contacts on a thin film of semiconductor material by forming strips of buffer material on top of the semiconductor material in locations corresponding to the desired dividing lines between back contacts, forming a film of metal substantially covering the semiconductor material and buffer strips, and scribing portions of the metal film overlying the buffer strips with a laser without contacting the underlying semiconductor material to separate the metal layer into a plurality of back contacts. The buffer material serves to protect the underlying semiconductor material from being damaged during the laser scribing. Back contacts and multi-cell photovoltaic modules incorporating such back contacts also are disclosed.

Inventors:
 [1];  [2];  [3]
  1. (Yardley, PA)
  2. (Pennington, NJ)
  3. (East Brunswick, NJ)
Issue Date:
OSTI Identifier:
866769
Patent Number(s):
4783421
Application Number:
07/068,753
Assignee:
Solarex Corporation (Rockville, MD) OSTI
DOE Contract Number:  
ZB4030563
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; manufacturing; electrical; contacts; thin-film; semiconductor; device; fabricating; spaced-apart; film; material; forming; strips; buffer; top; locations; corresponding; desired; dividing; lines; metal; substantially; covering; scribing; portions; overlying; laser; contacting; underlying; separate; layer; plurality; serves; protect; damaged; multi-cell; photovoltaic; modules; incorporating; disclosed; underlying semiconductor; buffer material; metal film; photovoltaic modules; electrical contacts; photovoltaic module; metal layer; electrical contact; semiconductor material; semiconductor device; substantially cover; laser scribing; substantially covering; thin-film semiconductor; film semiconductor; cell photovoltaic; material serves; forming strips; fabricating spaced-apart; locations corresponding; /438/136/257/

Citation Formats

Carlson, David E., Dickson, Charles R., and D'Aiello, Robert V. Method for manufacturing electrical contacts for a thin-film semiconductor device. United States: N. p., 1988. Web.
Carlson, David E., Dickson, Charles R., & D'Aiello, Robert V. Method for manufacturing electrical contacts for a thin-film semiconductor device. United States.
Carlson, David E., Dickson, Charles R., and D'Aiello, Robert V. Tue . "Method for manufacturing electrical contacts for a thin-film semiconductor device". United States. https://www.osti.gov/servlets/purl/866769.
@article{osti_866769,
title = {Method for manufacturing electrical contacts for a thin-film semiconductor device},
author = {Carlson, David E. and Dickson, Charles R. and D'Aiello, Robert V.},
abstractNote = {A method of fabricating spaced-apart back contacts on a thin film of semiconductor material by forming strips of buffer material on top of the semiconductor material in locations corresponding to the desired dividing lines between back contacts, forming a film of metal substantially covering the semiconductor material and buffer strips, and scribing portions of the metal film overlying the buffer strips with a laser without contacting the underlying semiconductor material to separate the metal layer into a plurality of back contacts. The buffer material serves to protect the underlying semiconductor material from being damaged during the laser scribing. Back contacts and multi-cell photovoltaic modules incorporating such back contacts also are disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {11}
}

Patent:

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