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Title: Piezoelectric shear wave resonator and method of making same

Abstract

An acoustic shear wave resonator comprising a piezoelectric film having its C-axis substantially inclined from the film normal such that the shear wave coupling coefficient significantly exceeds the longitudinal wave coupling coefficient, whereby the film is capable of shear wave resonance, and means for exciting said film to resonate. The film is prepared by deposition in a dc planar magnetron sputtering system to which a supplemental electric field is applied. The resonator structure may also include a semiconductor material having a positive temperature coefficient of resonance such that the resonator has a temperature coefficient of resonance approaching 0 ppm/.degree.C.

Inventors:
 [1];  [2];  [2]
  1. (Harbor City, CA)
  2. (Ames, IA)
Issue Date:
Research Org.:
Ames Laboratory (AMES), Ames, IA; Iowa State University, Ames, IA (US)
OSTI Identifier:
866474
Patent Number(s):
4719383
Assignee:
United States of America as represented by United States (Washington, DC) AMES
DOE Contract Number:  
W-7405-ENG-82
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
piezoelectric; shear; wave; resonator; method; acoustic; comprising; film; c-axis; substantially; inclined; normal; coupling; coefficient; significantly; exceeds; longitudinal; whereby; capable; resonance; means; exciting; resonate; prepared; deposition; dc; planar; magnetron; sputtering; supplemental; electric; field; applied; structure; semiconductor; material; positive; temperature; approaching; ppm; degree; piezoelectric film; wave resonator; magnetron sputter; magnetron sputtering; temperature coefficient; shear wave; electric field; semiconductor material; significantly exceeds; c-axis substantially; resonator structure; coupling coefficient; wave coupling; planar magnetron; resonator comprising; substantially inclined; coefficient significantly; longitudinal wave; film normal; piezoelectric shear; acoustic shear; axis substantially; /310/

Citation Formats

Wang, Jin S., Lakin, Kenneth M., and Landin, Allen R. Piezoelectric shear wave resonator and method of making same. United States: N. p., 1988. Web.
Wang, Jin S., Lakin, Kenneth M., & Landin, Allen R. Piezoelectric shear wave resonator and method of making same. United States.
Wang, Jin S., Lakin, Kenneth M., and Landin, Allen R. Fri . "Piezoelectric shear wave resonator and method of making same". United States. https://www.osti.gov/servlets/purl/866474.
@article{osti_866474,
title = {Piezoelectric shear wave resonator and method of making same},
author = {Wang, Jin S. and Lakin, Kenneth M. and Landin, Allen R.},
abstractNote = {An acoustic shear wave resonator comprising a piezoelectric film having its C-axis substantially inclined from the film normal such that the shear wave coupling coefficient significantly exceeds the longitudinal wave coupling coefficient, whereby the film is capable of shear wave resonance, and means for exciting said film to resonate. The film is prepared by deposition in a dc planar magnetron sputtering system to which a supplemental electric field is applied. The resonator structure may also include a semiconductor material having a positive temperature coefficient of resonance such that the resonator has a temperature coefficient of resonance approaching 0 ppm/.degree.C.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {1}
}

Patent:

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