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Title: Inorganic-polymer-derived dielectric films

Abstract

A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size onmore » the substrate.« less

Inventors:
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. State College, PA
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
866192
Patent Number(s):
4652467
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
C - CHEMISTRY C08 - ORGANIC MACROMOLECULAR COMPOUNDS C08G - MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
inorganic-polymer-derived; dielectric; films; method; coating; substrate; film; polymer; predetermined; porosity; comprises; depositing; non-gelled; solution; comprising; hydrolyzable; metal; alkoxide; polymeric; network; forming; cation; water; alcohol; compatible; hydrolysis; polymerization; acid; base; prior; controlling; structure; composition; exclusive; component; adjusting; content; ph; temperature; obtain; desired; concentration; time; standing; lowering; 15; degrees; trap; step; obtained; curing; deposited; effective; whereby; corresponding; pore; size; metal alkoxide; temperature effective; pore size; solution comprising; comprises depositing; water content; polymeric network; deposited film; dielectric films; /427/438/

Citation Formats

Brinker, C Jeffrey, Keefer, Keith D, and Lenahan, Patrick M. Inorganic-polymer-derived dielectric films. United States: N. p., 1987. Web.
Brinker, C Jeffrey, Keefer, Keith D, & Lenahan, Patrick M. Inorganic-polymer-derived dielectric films. United States.
Brinker, C Jeffrey, Keefer, Keith D, and Lenahan, Patrick M. Thu . "Inorganic-polymer-derived dielectric films". United States. https://www.osti.gov/servlets/purl/866192.
@article{osti_866192,
title = {Inorganic-polymer-derived dielectric films},
author = {Brinker, C Jeffrey and Keefer, Keith D and Lenahan, Patrick M},
abstractNote = {A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size on the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1987},
month = {1}
}

Patent:

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