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Title: Orientation filtering for crystalline films

Abstract

A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations.

Inventors:
 [1];  [2];  [3];  [4]
  1. Sudbury, MA
  2. Somerville, MA
  3. Watertown, MA
  4. Acton, MA
Issue Date:
OSTI Identifier:
866091
Patent Number(s):
4632723
Application Number:
06/481,096
Assignee:
Massachusetts Institute of Technology (Cambridge, MA)
Patent Classifications (CPCs):
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
AC02-80ER13019
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
orientation; filtering; crystalline; films; substrate; coated; film; recrystallized; pattern; crystallization; barriers; created; example; etching; voids; encapsulation; layer; applied; protect; fill; otherwise; enhance; recrystallization; process; carried; orientations; pass; preferentially; barrier; result; growth-velocity; anisotropy; specific; predetermined; crystallographic; range; set; discrete; crystalline films; orientation filter; velocity anisotropy; crystallization process; /117/

Citation Formats

Smith, Henry I, Atwater, Harry A, Thompson, Carl V, and Geis, Michael W. Orientation filtering for crystalline films. United States: N. p., 1986. Web.
Smith, Henry I, Atwater, Harry A, Thompson, Carl V, & Geis, Michael W. Orientation filtering for crystalline films. United States.
Smith, Henry I, Atwater, Harry A, Thompson, Carl V, and Geis, Michael W. Tue . "Orientation filtering for crystalline films". United States. https://www.osti.gov/servlets/purl/866091.
@article{osti_866091,
title = {Orientation filtering for crystalline films},
author = {Smith, Henry I and Atwater, Harry A and Thompson, Carl V and Geis, Michael W},
abstractNote = {A substrate is coated with a film to be recrystallized. A pattern of crystallization barriers is created in the film, for example, by etching voids in the film. An encapsulation layer is generally applied to protect the film, fill the voids and otherwise enhance a recrystallization process. Recrystallization is carried out such that certain orientations pass preferentially through the barrier, generally as a result of growth-velocity anisotropy. The result is a film of a specific predetermined crystallographic orientation, a range of orientations or a set of discrete orientations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {12}
}

Patent:

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