skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Use of metallic glasses for fabrication of structures with submicron dimensions

Abstract

Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.

Inventors:
 [1];  [1]
  1. Madison, WI
Issue Date:
Research Org.:
Univ. of Wisconsin, Madison, WI (United States)
OSTI Identifier:
866082
Patent Number(s):
4630094
Assignee:
Wisconsin Alumni Research Foundation (Madison, WI)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
DOE Contract Number:  
FG02-84ER45096
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
metallic; glasses; fabrication; structures; submicron; dimensions; patterned; dimension; formed; supported; unsupported; amorphous; metals; feature; sizes; characterized; etching; behavior; sufficient; allow; delineation; sharp; edges; smooth; flat; flanks; resistance; time-dependent; dimensional; changes; caused; creep; flow; in-diffusion; unwanted; impurities; out-diffusion; constituent; atoms; void; formation; grain; growth; phase; separation; transformations; compound; phase transformation; amorphous metal; metallic glass; phase separation; grain growth; metallic glasses; changes caused; sharp edges; feature sizes; dimensional changes; sharp edge; compound form; dimensional change; submicron dimension; /257/428/

Citation Formats

Wiley, John D, and Perepezko, John H. Use of metallic glasses for fabrication of structures with submicron dimensions. United States: N. p., 1986. Web.
Wiley, John D, & Perepezko, John H. Use of metallic glasses for fabrication of structures with submicron dimensions. United States.
Wiley, John D, and Perepezko, John H. Wed . "Use of metallic glasses for fabrication of structures with submicron dimensions". United States. https://www.osti.gov/servlets/purl/866082.
@article{osti_866082,
title = {Use of metallic glasses for fabrication of structures with submicron dimensions},
author = {Wiley, John D and Perepezko, John H},
abstractNote = {Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {1}
}

Patent:

Save / Share: