Use of metallic glasses for fabrication of structures with submicron dimensions
Abstract
Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.
- Inventors:
-
- Madison, WI
- Issue Date:
- Research Org.:
- Univ. of Wisconsin, Madison, WI (United States)
- OSTI Identifier:
- 866082
- Patent Number(s):
- 4630094
- Assignee:
- Wisconsin Alumni Research Foundation (Madison, WI)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- DOE Contract Number:
- FG02-84ER45096
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- metallic; glasses; fabrication; structures; submicron; dimensions; patterned; dimension; formed; supported; unsupported; amorphous; metals; feature; sizes; characterized; etching; behavior; sufficient; allow; delineation; sharp; edges; smooth; flat; flanks; resistance; time-dependent; dimensional; changes; caused; creep; flow; in-diffusion; unwanted; impurities; out-diffusion; constituent; atoms; void; formation; grain; growth; phase; separation; transformations; compound; phase transformation; amorphous metal; metallic glass; phase separation; grain growth; metallic glasses; changes caused; sharp edges; feature sizes; dimensional changes; sharp edge; compound form; dimensional change; submicron dimension; /257/428/
Citation Formats
Wiley, John D, and Perepezko, John H. Use of metallic glasses for fabrication of structures with submicron dimensions. United States: N. p., 1986.
Web.
Wiley, John D, & Perepezko, John H. Use of metallic glasses for fabrication of structures with submicron dimensions. United States.
Wiley, John D, and Perepezko, John H. Wed .
"Use of metallic glasses for fabrication of structures with submicron dimensions". United States. https://www.osti.gov/servlets/purl/866082.
@article{osti_866082,
title = {Use of metallic glasses for fabrication of structures with submicron dimensions},
author = {Wiley, John D and Perepezko, John H},
abstractNote = {Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1986},
month = {Wed Jan 01 00:00:00 EST 1986}
}
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