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Title: Low frequency acoustic microscope

Abstract

A scanning acoustic microscope is disclosed for the detection and location of near surface flaws, inclusions or voids in a solid sample material. A focused beam of acoustic energy is directed at the sample with its focal plane at the subsurface flaw, inclusion or void location. The sample is scanned with the beam. Detected acoustic energy specularly reflected and mode converted at the surface of the sample and acoustic energy reflected by subsurface flaws, inclusions or voids at the focal plane are used for generating an interference signal which is processed and forms a signal indicative of the subsurface flaws, inclusions or voids.

Inventors:
 [1]
  1. Palo Alto, CA
Issue Date:
OSTI Identifier:
866040
Patent Number(s):
4620443
Application Number:
06/681,229
Assignee:
Board of Trustees of Leland Stanford Junior University (Stanford, CA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
frequency; acoustic; microscope; scanning; disclosed; detection; location; near; surface; flaws; inclusions; voids; solid; sample; material; focused; beam; energy; directed; focal; plane; subsurface; flaw; inclusion; void; scanned; detected; specularly; reflected; mode; converted; generating; interference; signal; processed; forms; indicative; acoustic microscope; solid sample; near surface; acoustic energy; signal indicative; focal plane; energy reflected; focused beam; sample material; surface flaws; frequency acoustic; interference signal; /73/

Citation Formats

Khuri-Yakub, Butrus T. Low frequency acoustic microscope. United States: N. p., 1986. Web.
Khuri-Yakub, Butrus T. Low frequency acoustic microscope. United States.
Khuri-Yakub, Butrus T. Tue . "Low frequency acoustic microscope". United States. https://www.osti.gov/servlets/purl/866040.
@article{osti_866040,
title = {Low frequency acoustic microscope},
author = {Khuri-Yakub, Butrus T},
abstractNote = {A scanning acoustic microscope is disclosed for the detection and location of near surface flaws, inclusions or voids in a solid sample material. A focused beam of acoustic energy is directed at the sample with its focal plane at the subsurface flaw, inclusion or void location. The sample is scanned with the beam. Detected acoustic energy specularly reflected and mode converted at the surface of the sample and acoustic energy reflected by subsurface flaws, inclusions or voids at the focal plane are used for generating an interference signal which is processed and forms a signal indicative of the subsurface flaws, inclusions or voids.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {11}
}