Vacuum vapor deposition gun assembly
Abstract
A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.
- Inventors:
-
- Boulder, CO
- Issue Date:
- Research Org.:
- Rockwell International Corp., Canoga Park, CA (United States)
- OSTI Identifier:
- 865720
- Patent Number(s):
- 4561382
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC04-76DP03533
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- vacuum; vapor; deposition; gun; assembly; hollow; cylindrical; outer; surface; plate; holding; adjustable; heat; sink; hot; cathode; magnets; steering; plasma; crucible; shutter; selectively; covering; uncovering; cylindrical outer; hollow cathode; heat sink; outer surface; vapor deposition; vacuum vapor; cathode gun; gun assembly; hot hollow; deposition gun; /118/219/
Citation Formats
Zeren, Joseph D. Vacuum vapor deposition gun assembly. United States: N. p., 1985.
Web.
Zeren, Joseph D. Vacuum vapor deposition gun assembly. United States.
Zeren, Joseph D. Tue .
"Vacuum vapor deposition gun assembly". United States. https://www.osti.gov/servlets/purl/865720.
@article{osti_865720,
title = {Vacuum vapor deposition gun assembly},
author = {Zeren, Joseph D},
abstractNote = {A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}
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