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Title: Vacuum vapor deposition gun assembly

Abstract

A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.

Inventors:
 [1]
  1. (Boulder, CO)
Issue Date:
Research Org.:
ROCKWELL INTERNATIONAL CORP
OSTI Identifier:
865720
Patent Number(s):
4561382
Assignee:
United States of America as represented by United States (Washington, DC) SNL
DOE Contract Number:  
AC04-76DP03533
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
vacuum; vapor; deposition; gun; assembly; hollow; cylindrical; outer; surface; plate; holding; adjustable; heat; sink; hot; cathode; magnets; steering; plasma; crucible; shutter; selectively; covering; uncovering; cylindrical outer; hollow cathode; heat sink; outer surface; vapor deposition; vacuum vapor; cathode gun; gun assembly; hot hollow; deposition gun; /118/219/

Citation Formats

Zeren, Joseph D. Vacuum vapor deposition gun assembly. United States: N. p., 1985. Web.
Zeren, Joseph D. Vacuum vapor deposition gun assembly. United States.
Zeren, Joseph D. Tue . "Vacuum vapor deposition gun assembly". United States. https://www.osti.gov/servlets/purl/865720.
@article{osti_865720,
title = {Vacuum vapor deposition gun assembly},
author = {Zeren, Joseph D.},
abstractNote = {A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering the plasma from the gun into a crucible on the heat sink, and a shutter for selectively covering and uncovering the crucible.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}

Patent:

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