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Title: Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith

Abstract

A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.

Inventors:
 [1];  [1];  [2];  [3]
  1. (Patchogue, NY)
  2. (East Patchogue, NY)
  3. (Belle Terre, NY)
Issue Date:
Research Org.:
ASSOC UNIVERSITIES INC
OSTI Identifier:
865702
Patent Number(s):
4559096
Assignee:
United States of America as represented by United States (Washington, DC) BNL
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; precisely; modifying; predetermined; surface; layers; workpiece; cluster; impact; therewith; selected; producing; beam; charged; narrowly; mass; mean; size; range; 25; 10; atoms; accelerated; critical; velocity; outer; preselected; rate; impacts; cm; effect; precise; modification; outer surface; surface layer; surface layers; predetermined surface; precisely modifying; mass selected; /156/204/219/250/376/427/438/

Citation Formats

Friedman, Lewis, Buehler, Robert J., Matthew, Michael W., and Ledbetter, Myron. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States: N. p., 1985. Web.
Friedman, Lewis, Buehler, Robert J., Matthew, Michael W., & Ledbetter, Myron. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States.
Friedman, Lewis, Buehler, Robert J., Matthew, Michael W., and Ledbetter, Myron. Tue . "Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith". United States. https://www.osti.gov/servlets/purl/865702.
@article{osti_865702,
title = {Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith},
author = {Friedman, Lewis and Buehler, Robert J. and Matthew, Michael W. and Ledbetter, Myron},
abstractNote = {A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}

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