Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith
Abstract
A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.
- Inventors:
-
- Patchogue, NY
- East Patchogue, NY
- Belle Terre, NY
- Issue Date:
- Research Org.:
- Associated Universities, Inc., Upton, NY (United States)
- OSTI Identifier:
- 865702
- Patent Number(s):
- 4559096
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC02-76CH00016
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; precisely; modifying; predetermined; surface; layers; workpiece; cluster; impact; therewith; selected; producing; beam; charged; narrowly; mass; mean; size; range; 25; 10; atoms; accelerated; critical; velocity; outer; preselected; rate; impacts; cm; effect; precise; modification; outer surface; surface layer; surface layers; predetermined surface; precisely modifying; mass selected; /156/204/219/250/376/427/438/
Citation Formats
Friedman, Lewis, Buehler, Robert J, Matthew, Michael W, and Ledbetter, Myron. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States: N. p., 1985.
Web.
Friedman, Lewis, Buehler, Robert J, Matthew, Michael W, & Ledbetter, Myron. Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith. United States.
Friedman, Lewis, Buehler, Robert J, Matthew, Michael W, and Ledbetter, Myron. Tue .
"Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith". United States. https://www.osti.gov/servlets/purl/865702.
@article{osti_865702,
title = {Method of precisely modifying predetermined surface layers of a workpiece by cluster ion impact therewith},
author = {Friedman, Lewis and Buehler, Robert J and Matthew, Michael W and Ledbetter, Myron},
abstractNote = {A method of precisely modifying a selected area of a workpiece by producing a beam of charged cluster ions that is narrowly mass selected to a predetermined mean size of cluster ions within a range of 25 to 10.sup.6 atoms per cluster ion, and accelerated in a beam to a critical velocity. The accelerated beam is used to impact a selected area of an outer surface of the workpiece at a preselected rate of impacts of cluster ions/cm.sup.2 /sec. in order to effect a precise modification in that selected area of the workpiece.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}