skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Secondary ion collection and transport system for ion microprobe

Abstract

A secondary ion collection and transport system, for use with an ion microprobe, which is very compact and occupies only a small working distance, thereby enabling the primary ion beam to have a short focal length and high resolution. Ions sputtered from the target surface by the primary beam's impact are collected between two arcuate members having radii of curvature and applied voltages that cause only ions within a specified energy band to be collected. The collected ions are accelerated and focused in a transport section consisting of a plurality of spaced conductive members which are coaxial with and distributed along the desired ion path. Relatively high voltages are applied to alternate transport sections to produce accelerating electric fields sufficient to transport the ions through the section to an ion mass analyzer, while lower voltages are applied to the other transport sections to focus the ions and bring their velocity to a level compatible with the analyzing apparatus.

Inventors:
 [1];  [2];  [3];  [4]
  1. (Canoga Park, CA)
  2. (Simi Valley, CA)
  3. (Santa Monica, CA)
  4. (Camarillo, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
865692
Patent Number(s):
4556794
Assignee:
Hughes Aircraft Company (El Segundo, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
secondary; collection; transport; microprobe; compact; occupies; distance; enabling; primary; beam; focal; length; resolution; sputtered; target; surface; impact; collected; arcuate; radii; curvature; applied; voltages; specified; energy; band; accelerated; focused; section; consisting; plurality; spaced; conductive; coaxial; distributed; desired; path; relatively; alternate; sections; produce; accelerating; electric; fields; sufficient; mass; analyzer; focus; bring; velocity; level; compatible; analyzing; apparatus; focal length; electric field; target surface; electric fields; applied voltage; primary beam; mass analyzer; energy band; /250/

Citation Formats

Ward, James W., Schlanger, Herbert, McNulty, Jr., Hugh, and Parker, Norman W. Secondary ion collection and transport system for ion microprobe. United States: N. p., 1985. Web.
Ward, James W., Schlanger, Herbert, McNulty, Jr., Hugh, & Parker, Norman W. Secondary ion collection and transport system for ion microprobe. United States.
Ward, James W., Schlanger, Herbert, McNulty, Jr., Hugh, and Parker, Norman W. Tue . "Secondary ion collection and transport system for ion microprobe". United States. https://www.osti.gov/servlets/purl/865692.
@article{osti_865692,
title = {Secondary ion collection and transport system for ion microprobe},
author = {Ward, James W. and Schlanger, Herbert and McNulty, Jr., Hugh and Parker, Norman W.},
abstractNote = {A secondary ion collection and transport system, for use with an ion microprobe, which is very compact and occupies only a small working distance, thereby enabling the primary ion beam to have a short focal length and high resolution. Ions sputtered from the target surface by the primary beam's impact are collected between two arcuate members having radii of curvature and applied voltages that cause only ions within a specified energy band to be collected. The collected ions are accelerated and focused in a transport section consisting of a plurality of spaced conductive members which are coaxial with and distributed along the desired ion path. Relatively high voltages are applied to alternate transport sections to produce accelerating electric fields sufficient to transport the ions through the section to an ion mass analyzer, while lower voltages are applied to the other transport sections to focus the ions and bring their velocity to a level compatible with the analyzing apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}

Patent:

Save / Share: