Apparatus for mounting crystal
Abstract
A thickness monitor useful in deposition or etching reactor systems comprising a crystal-controlled oscillator in which the crystal is deposited or etched to change the frequency of the oscillator. The crystal rests within a thermally conductive metallic housing and arranged to be temperature controlled. Electrode contacts are made to the surface primarily by gravity force such that the crystal is substantially free of stress otherwise induced by high temperature.
- Inventors:
-
- (East Windsor, NJ)
- Issue Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- OSTI Identifier:
- 865639
- Patent Number(s):
- 4547648
- Assignee:
- RCA Corporation (Princeton, NJ) NREL
- DOE Contract Number:
- EG-77-C-01-4042
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; mounting; crystal; thickness; monitor; useful; deposition; etching; reactor; systems; comprising; crystal-controlled; oscillator; deposited; etched; change; frequency; thermally; conductive; metallic; housing; arranged; temperature; controlled; electrode; contacts; surface; primarily; gravity; force; substantially; free; stress; otherwise; induced; temperature controlled; reactor systems; systems comprising; temperature control; metallic housing; substantially free; thermally conductive; conductive metal; conductive metallic; controlled oscillator; /219/29/310/
Citation Formats
Longeway, Paul A. Apparatus for mounting crystal. United States: N. p., 1985.
Web.
Longeway, Paul A. Apparatus for mounting crystal. United States.
Longeway, Paul A. Tue .
"Apparatus for mounting crystal". United States. https://www.osti.gov/servlets/purl/865639.
@article{osti_865639,
title = {Apparatus for mounting crystal},
author = {Longeway, Paul A.},
abstractNote = {A thickness monitor useful in deposition or etching reactor systems comprising a crystal-controlled oscillator in which the crystal is deposited or etched to change the frequency of the oscillator. The crystal rests within a thermally conductive metallic housing and arranged to be temperature controlled. Electrode contacts are made to the surface primarily by gravity force such that the crystal is substantially free of stress otherwise induced by high temperature.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.