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Title: Apparatus for mounting crystal

Abstract

A thickness monitor useful in deposition or etching reactor systems comprising a crystal-controlled oscillator in which the crystal is deposited or etched to change the frequency of the oscillator. The crystal rests within a thermally conductive metallic housing and arranged to be temperature controlled. Electrode contacts are made to the surface primarily by gravity force such that the crystal is substantially free of stress otherwise induced by high temperature.

Inventors:
 [1]
  1. (East Windsor, NJ)
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
OSTI Identifier:
865639
Patent Number(s):
4547648
Assignee:
RCA Corporation (Princeton, NJ) NREL
DOE Contract Number:  
EG-77-C-01-4042
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; mounting; crystal; thickness; monitor; useful; deposition; etching; reactor; systems; comprising; crystal-controlled; oscillator; deposited; etched; change; frequency; thermally; conductive; metallic; housing; arranged; temperature; controlled; electrode; contacts; surface; primarily; gravity; force; substantially; free; stress; otherwise; induced; temperature controlled; reactor systems; systems comprising; temperature control; metallic housing; substantially free; thermally conductive; conductive metal; conductive metallic; controlled oscillator; /219/29/310/

Citation Formats

Longeway, Paul A. Apparatus for mounting crystal. United States: N. p., 1985. Web.
Longeway, Paul A. Apparatus for mounting crystal. United States.
Longeway, Paul A. Tue . "Apparatus for mounting crystal". United States. https://www.osti.gov/servlets/purl/865639.
@article{osti_865639,
title = {Apparatus for mounting crystal},
author = {Longeway, Paul A.},
abstractNote = {A thickness monitor useful in deposition or etching reactor systems comprising a crystal-controlled oscillator in which the crystal is deposited or etched to change the frequency of the oscillator. The crystal rests within a thermally conductive metallic housing and arranged to be temperature controlled. Electrode contacts are made to the surface primarily by gravity force such that the crystal is substantially free of stress otherwise induced by high temperature.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}

Patent:

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