Process and apparatus for formation of photovoltaic compounds
Abstract
The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.
- Inventors:
-
- Newark, DE
- Wilmington, DE
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- OSTI Identifier:
- 865500
- Patent Number(s):
- 4526809
- Assignee:
- University of Delaware (Newark, DE)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- EG-77-C-01-4042
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- process; apparatus; formation; photovoltaic; compounds; relates; deposition; films; substrate; vacuum; evaporation; elements; form; zn; cd; 1-x; compound; preselected; fixed; ratio; cadmium; zinc; characterized; rate; proportional; stoichiometric; intended; sulfur; twice; combined; rates; required; stoichiometry; stoichiometric ratio; /438/117/136/427/
Citation Formats
Hall, Robert B, and Rocheleau, Richard E. Process and apparatus for formation of photovoltaic compounds. United States: N. p., 1985.
Web.
Hall, Robert B, & Rocheleau, Richard E. Process and apparatus for formation of photovoltaic compounds. United States.
Hall, Robert B, and Rocheleau, Richard E. Tue .
"Process and apparatus for formation of photovoltaic compounds". United States. https://www.osti.gov/servlets/purl/865500.
@article{osti_865500,
title = {Process and apparatus for formation of photovoltaic compounds},
author = {Hall, Robert B and Rocheleau, Richard E},
abstractNote = {The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}