Thin films of mixed metal compounds
Abstract
A compositionally uniform thin film of a mixed metal compound is formed by simultaneously evaporating a first metal compound and a second metal compound from independent sources. The mean free path between the vapor particles is reduced by a gas and the mixed vapors are deposited uniformly. The invention finds particular utility in forming thin film heterojunction solar cells.
- Inventors:
-
- Bellevue, WA
- Seattle, WA
- Issue Date:
- Research Org.:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- OSTI Identifier:
- 865480
- Patent Number(s):
- 4523051
- Assignee:
- Boeing Company (Seattle, WA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- DOE Contract Number:
- EG-77-C-01-4042
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- films; mixed; metal; compounds; compositionally; uniform; film; compound; formed; simultaneously; evaporating; independent; sources; mean; free; path; vapor; particles; reduced; gas; vapors; deposited; uniformly; particular; utility; forming; heterojunction; solar; cells; free path; mean free; heterojunction solar; metal compound; metal compounds; mixed metal; solar cell; solar cells; particular utility; junction solar; film heterojunction; mixed vapor; /136/427/438/
Citation Formats
Mickelsen, Reid A, and Chen, Wen S. Thin films of mixed metal compounds. United States: N. p., 1985.
Web.
Mickelsen, Reid A, & Chen, Wen S. Thin films of mixed metal compounds. United States.
Mickelsen, Reid A, and Chen, Wen S. Tue .
"Thin films of mixed metal compounds". United States. https://www.osti.gov/servlets/purl/865480.
@article{osti_865480,
title = {Thin films of mixed metal compounds},
author = {Mickelsen, Reid A and Chen, Wen S},
abstractNote = {A compositionally uniform thin film of a mixed metal compound is formed by simultaneously evaporating a first metal compound and a second metal compound from independent sources. The mean free path between the vapor particles is reduced by a gas and the mixed vapors are deposited uniformly. The invention finds particular utility in forming thin film heterojunction solar cells.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {1}
}