Electron beam cutting
Abstract
A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.
- Inventors:
-
- Champaign, IL
- Abingdon, GB2
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- OSTI Identifier:
- 865396
- Patent Number(s):
- 4508952
- Application Number:
- 06/467,559
- Assignee:
- University Patents, Inc. (Westport, CT)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
- DOE Contract Number:
- AC02-76ER01198
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- electron; beam; cutting; method; holes; 20; angstroms; diameter; lines; wide; material; positive; ionic; conduction; focused; probe; described; stable; ambient; conditions; ambient conditions; electron beam; ionic conduction; focused electron; /219/
Citation Formats
Mochel, Margaret E, and Humphreys, Colin J. Electron beam cutting. United States: N. p., 1985.
Web.
Mochel, Margaret E, & Humphreys, Colin J. Electron beam cutting. United States.
Mochel, Margaret E, and Humphreys, Colin J. Tue .
"Electron beam cutting". United States. https://www.osti.gov/servlets/purl/865396.
@article{osti_865396,
title = {Electron beam cutting},
author = {Mochel, Margaret E and Humphreys, Colin J},
abstractNote = {A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {4}
}
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