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Title: Electron beam cutting

Abstract

A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.

Inventors:
 [1];  [2]
  1. (Champaign, IL)
  2. (Abingdon, GB2)
Issue Date:
Research Org.:
University of Illinois
OSTI Identifier:
865396
Patent Number(s):
4508952
Application Number:
06/467,559
Assignee:
University Patents, Inc. (Westport, CT) BNL
DOE Contract Number:  
AC02-76ER01198
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
electron; beam; cutting; method; holes; 20; angstroms; diameter; lines; wide; material; positive; ionic; conduction; focused; probe; described; stable; ambient; conditions; ambient conditions; electron beam; ionic conduction; focused electron; /219/

Citation Formats

Mochel, Margaret E., and Humphreys, Colin J. Electron beam cutting. United States: N. p., 1985. Web.
Mochel, Margaret E., & Humphreys, Colin J. Electron beam cutting. United States.
Mochel, Margaret E., and Humphreys, Colin J. Tue . "Electron beam cutting". United States. https://www.osti.gov/servlets/purl/865396.
@article{osti_865396,
title = {Electron beam cutting},
author = {Mochel, Margaret E. and Humphreys, Colin J.},
abstractNote = {A method for the cutting of holes 20 Angstroms in diameter, or lines 20 Angstroms wide in a material having positive ionic conduction by the use of a focused electron probe is described. The holes and lines are stable under ambient conditions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1985},
month = {4}
}

Patent:

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