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Title: Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity

Abstract

A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.

Inventors:
 [1];  [2];  [3]
+ Show Inventor Affiliations
  1. (Argonne, IL)
  2. (Tucson, AZ)
  3. (Woodridge, IL)
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL
OSTI Identifier:
865051
Patent Number(s):
4454495
Assignee:
United States of America as represented by United States (Washington, DC) ANL
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
layered; ultra-thin; coherent; structures; electrical; resistors; temperature; coefficient; resistivity; film; resistor; controlled; resistance; tcr; ranging; negative; positive; degrees; kelvin; relatively; multilayer; superlattice; crystal; containing; plurality; alternating; layers; metals; varied; controlling; thickness; individual; readily; prepared; methods; compatible; circuitry; manufacturing; techniques; individual layers; temperature coefficient; controlled temperature; dual layer; readily prepared; manufacturing techniques; superlattice crystal; film resistor; layer superlattice; film circuit; degrees kelvin; crystal containing; /338/505/

Citation Formats

Werner, Thomas R., Falco, Charles M., and Schuller, Ivan K. Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity. United States: N. p., 1984. Web.
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Werner, Thomas R., Falco, Charles M., & Schuller, Ivan K. Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity. United States.
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Werner, Thomas R., Falco, Charles M., and Schuller, Ivan K. Sun . "Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity". United States. https://www.osti.gov/servlets/purl/865051.
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@article{osti_865051,
title = {Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity},
author = {Werner, Thomas R. and Falco, Charles M. and Schuller, Ivan K.},
abstractNote = {A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {1}
}
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