Method of making coherent multilayer crystals
Abstract
A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 .ANG. to 2500 .ANG.. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.
- Inventors:
-
- Woodridge, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 864864
- Patent Number(s):
- 4430183
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; coherent; multilayer; crystals; material; consisting; crystal; elements; layer; composed; single; element; vary; thickness; ang; 2500; prepared; sputter; deposition; conditions; slow; sputtered; atoms; near; substrate; temperatures; contact; material consisting; single element; sputter deposition; substrate temperature; multilayer crystals; substrate temperatures; coherent multilayer; rate temperature; sputtered atoms; sputter deposit; multilayer crystal; /204/117/505/
Citation Formats
Schuller, Ivan K, and Falco, Charles M. Method of making coherent multilayer crystals. United States: N. p., 1984.
Web.
Schuller, Ivan K, & Falco, Charles M. Method of making coherent multilayer crystals. United States.
Schuller, Ivan K, and Falco, Charles M. Sun .
"Method of making coherent multilayer crystals". United States. https://www.osti.gov/servlets/purl/864864.
@article{osti_864864,
title = {Method of making coherent multilayer crystals},
author = {Schuller, Ivan K and Falco, Charles M},
abstractNote = {A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 .ANG. to 2500 .ANG.. The multilayer crystals are prepared by sputter deposition under conditions which slow the sputtered atoms to near substrate temperatures before they contact the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1984},
month = {1}
}
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